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a simple but effective technique for surface cleaning, surface sterilization, doping, and oxidation, and is applicable to a wide range of materials. In this study, we investigated how UV-O3 treatment affects the optical and electrical properties of molybdenum disulfide (MoS2), with and without the presence of a dielectric substrate. We performed detailed photoluminescence (PL) measurements on 1\u20137 layers of MoS2 with up to 8 min of UV-O3 exposure. Density functional theory (DFT) calculations were carried out to provide insight into oxygen-MoS2 interaction mechanisms. Our results showed that the influence of UV-O3 treatment on PL depends on whether the substrate is present, as well as the number of layers. Additionally, 4 min of UV-O3 treatment was found to be optimal to produce p-type MoS2, while maintaining above 80% of the PL intensity and the emission wavelength, compared to pristine flakes (intrinsically n-type). UV-O3 treatment for more than 6 min not only caused a reduction in the electron density but also deteriorated the hole-dominated transport. It is revealed that the substrate plays a critical role in the manipulation of the electrical and optical properties of MoS2, which should be considered in future device fabrication and applications.<\/jats:p>","DOI":"10.3390\/nano13233034","type":"journal-article","created":{"date-parts":[[2023,11,28]],"date-time":"2023-11-28T07:40:01Z","timestamp":1701157201000},"page":"3034","update-policy":"https:\/\/doi.org\/10.3390\/mdpi_crossmark_policy","source":"Crossref","is-referenced-by-count":7,"title":["Ultraviolet-Ozone Treatment: An Effective Method for Fine-Tuning Optical and Electrical Properties of Suspended and Substrate-Supported MoS2"],"prefix":"10.3390","volume":"13","author":[{"ORCID":"https:\/\/orcid.org\/0000-0002-8860-4321","authenticated-orcid":false,"given":"Fahrettin","family":"Sarcan","sequence":"first","affiliation":[{"name":"School of Physics, Engineering and Technology, University of York, Heslington, York YO10 5DD, UK"},{"name":"Department of Physics, Faculty of Science, Istanbul University, Vezneciler, Istanbul 34134, Turkey"}],"role":[{"role":"author","vocabulary":"crossref"}]},{"ORCID":"https:\/\/orcid.org\/0000-0001-7288-1175","authenticated-orcid":false,"given":"Alex J.","family":"Armstrong","sequence":"additional","affiliation":[{"name":"School of Physics, Engineering and Technology, University of York, Heslington, York YO10 5DD, UK"}],"role":[{"role":"author","vocabulary":"crossref"}]},{"given":"Yusuf K.","family":"Bostan","sequence":"additional","affiliation":[{"name":"Department of Physics, Faculty of Science, Istanbul University, Vezneciler, Istanbul 34134, Turkey"},{"name":"Institut d\u2019Electronique, Microelectronique & Nanotechnologie IEMN CNRS UMR 8520, Universit\u00e9 Polytechnique Hauts de France, 59313 Valenciennes, France"}],"role":[{"role":"author","vocabulary":"crossref"}]},{"given":"Esra","family":"Kus","sequence":"additional","affiliation":[{"name":"Department of Physics, Faculty of Science, Istanbul University, Vezneciler, Istanbul 34134, Turkey"}],"role":[{"role":"author","vocabulary":"crossref"}]},{"given":"Keith P.","family":"McKenna","sequence":"additional","affiliation":[{"name":"School of Physics, Engineering and Technology, University of York, Heslington, York YO10 5DD, UK"}],"role":[{"role":"author","vocabulary":"crossref"}]},{"given":"Ayse","family":"Erol","sequence":"additional","affiliation":[{"name":"Department of Physics, Faculty of Science, Istanbul University, Vezneciler, Istanbul 34134, Turkey"}],"role":[{"role":"author","vocabulary":"crossref"}]},{"ORCID":"https:\/\/orcid.org\/0000-0002-2482-005X","authenticated-orcid":false,"given":"Yue","family":"Wang","sequence":"additional","affiliation":[{"name":"School of Physics, Engineering and Technology, University of York, Heslington, York YO10 5DD, UK"}],"role":[{"role":"author","vocabulary":"crossref"}]}],"member":"1968","published-online":{"date-parts":[[2023,11,27]]},"reference":[{"key":"ref_1","doi-asserted-by":"crossref","first-page":"1800015","DOI":"10.1002\/lpor.201800015","article-title":"1305 nm Few-Layer MoTe2 -on-Silicon Laser-Like Emission","volume":"12","author":"Fang","year":"2018","journal-title":"Laser Photon. 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