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It was found that, even using a non-stoichiometric target, the films formed under various conditions were consistently of the perovskite-like n = \u221e SrIrO3 phase, with no evidence of other RP series phases. A detailed inspection of the temperature\u2013oxygen phase diagram underscored that kinetics mechanisms prevail over thermodynamics considerations. The analysis of the angular distribution of sputtered iridium and strontium species indicated clearly different spatial distribution patterns. Additionally, significant backsputtering was detected at elevated temperatures. Thus, it is assumed that the interplay between these two kinetic phenomena is at the origin of the preferential nucleation of the SrIrO3 phase. In addition, strategies for controlling cation stoichiometry off-axis have also been explored. Finally, the long-term stability of the films has been demonstrated.<\/jats:p>","DOI":"10.3390\/nano14030242","type":"journal-article","created":{"date-parts":[[2024,1,23]],"date-time":"2024-01-23T04:17:40Z","timestamp":1705983460000},"page":"242","update-policy":"https:\/\/doi.org\/10.3390\/mdpi_crossmark_policy","source":"Crossref","is-referenced-by-count":3,"title":["Evaluation of Sputtering Processes in Strontium Iridate Thin Films"],"prefix":"10.3390","volume":"14","author":[{"ORCID":"https:\/\/orcid.org\/0000-0002-7817-1649","authenticated-orcid":false,"given":"V\u00edctor","family":"Fuentes","sequence":"first","affiliation":[{"name":"Instituto de Ciencia de Materiales de Barcelona, ICMAB-CSIC, Campus Universitario UAB, 08193 Bellaterra, Spain"}],"role":[{"vocabulary":"crossref","role":"author"}]},{"given":"Lluis","family":"Balcells","sequence":"additional","affiliation":[{"name":"Instituto de Ciencia de Materiales de Barcelona, ICMAB-CSIC, Campus Universitario UAB, 08193 Bellaterra, Spain"}],"role":[{"vocabulary":"crossref","role":"author"}]},{"ORCID":"https:\/\/orcid.org\/0000-0002-6871-7038","authenticated-orcid":false,"given":"Zorica","family":"Konstantinovi\u0107","sequence":"additional","affiliation":[{"name":"Center for Solid State Physics and New Materials, Institute of Physics Belgrade, University of Belgrade, Pregrevica 118, 11080 Belgrade, Serbia"}],"role":[{"vocabulary":"crossref","role":"author"}]},{"ORCID":"https:\/\/orcid.org\/0000-0001-9879-7748","authenticated-orcid":false,"given":"Benjam\u00edn","family":"Mart\u00ednez","sequence":"additional","affiliation":[{"name":"Instituto de Ciencia de Materiales de Barcelona, ICMAB-CSIC, Campus Universitario UAB, 08193 Bellaterra, Spain"}],"role":[{"vocabulary":"crossref","role":"author"}]},{"ORCID":"https:\/\/orcid.org\/0000-0002-5855-2356","authenticated-orcid":false,"given":"Alberto","family":"Pomar","sequence":"additional","affiliation":[{"name":"Instituto de Ciencia de Materiales de Barcelona, ICMAB-CSIC, Campus Universitario UAB, 08193 Bellaterra, Spain"}],"role":[{"vocabulary":"crossref","role":"author"}]}],"member":"1968","published-online":{"date-parts":[[2024,1,23]]},"reference":[{"key":"ref_1","doi-asserted-by":"crossref","first-page":"1900990","DOI":"10.1002\/admi.201900990","article-title":"Functional Oxide Thin Films for Advanced Energy and Information Technology","volume":"6","author":"Pryds","year":"2019","journal-title":"Adv. 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