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As a result, metal oxide semiconductor (MOS) sensors have been widely utilized in various fields, including medical diagnostics, environmental monitoring, food processing, and chemical production. Extensive research has been conducted worldwide to enhance the gas-sensing performance of MOS materials. However, traditional MOS materials suffer from limitations such as a small specific surface area and a low density of active sites, leading to poor gas sensing properties\u2014characterized by low sensitivity and selectivity, high detection limits and operating temperatures, as well as long response and recovery times. To address these challenges in triethylamine detection, this paper reviews the synthesis of nano-microspheres, porous micro-octahedra, and hollow prism-like nanoflowers via chemical solution methods. The triethylamine sensing performance of MOS materials, such as ZnO and In2O3, can be significantly enhanced through nano-morphology control, electronic band engineering, and noble metal loading. Additionally, strategies, including elemental doping, oxygen vacancy modulation, and structural morphology optimization, have been employed to achieve ultra-high sensitivity in triethylamine detection. This review further explores the underlying mechanisms responsible for the improved gas sensitivity. Finally, perspectives on future research directions in triethylamine gas sensing are provided.<\/jats:p>","DOI":"10.3390\/nano15060427","type":"journal-article","created":{"date-parts":[[2025,3,11]],"date-time":"2025-03-11T08:59:52Z","timestamp":1741683592000},"page":"427","update-policy":"https:\/\/doi.org\/10.3390\/mdpi_crossmark_policy","source":"Crossref","is-referenced-by-count":43,"title":["Nano-Micro Structure of Metal Oxide Semiconductors for Triethylamine Sensors: ZnO and In2O3"],"prefix":"10.3390","volume":"15","author":[{"given":"Yongbo","family":"Fan","sequence":"first","affiliation":[{"name":"Department of Applied Physics, The Hong Kong Polytechnic University, Hung Hom, Hong Kong 100872, China"}],"role":[{"vocabulary":"crossref","role":"author"}]},{"given":"Lixin","family":"Song","sequence":"additional","affiliation":[{"name":"State Key Laboratory of Solidiffcation Processing, School of Materials Science and Engineering, Northwestern Polytechnical University, Xi\u2019an 710072, China"}],"role":[{"vocabulary":"crossref","role":"author"}]},{"given":"Weijia","family":"Wang","sequence":"additional","affiliation":[{"name":"State Key Laboratory of Solidiffcation Processing, School of Materials Science and Engineering, Northwestern Polytechnical University, Xi\u2019an 710072, China"}],"role":[{"vocabulary":"crossref","role":"author"}]},{"ORCID":"https:\/\/orcid.org\/0000-0002-1405-9279","authenticated-orcid":false,"given":"Huiqing","family":"Fan","sequence":"additional","affiliation":[{"name":"State Key Laboratory of Solidiffcation Processing, School of Materials Science and Engineering, Northwestern Polytechnical University, Xi\u2019an 710072, China"}],"role":[{"vocabulary":"crossref","role":"author"}]}],"member":"1968","published-online":{"date-parts":[[2025,3,11]]},"reference":[{"key":"ref_1","doi-asserted-by":"crossref","first-page":"143522","DOI":"10.1016\/j.chemosphere.2024.143522","article-title":"High sensitivity and selectivity of h-BN\/WO3 nn heterojunction to triethylamine at low-temperature","volume":"366","author":"Zhu","year":"2024","journal-title":"Chemosphere"},{"key":"ref_2","doi-asserted-by":"crossref","first-page":"127456","DOI":"10.1016\/j.snb.2019.127456","article-title":"High sensitivity and ultra-low detection limit of chlorine gas sensor based on In2O3 nanosheets by a simple template method","volume":"305","author":"Ma","year":"2020","journal-title":"Sens. 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