{"status":"ok","message-type":"work","message-version":"1.0.0","message":{"indexed":{"date-parts":[[2026,7,30]],"date-time":"2026-07-30T10:19:34Z","timestamp":1785406774286,"version":"3.56.0"},"reference-count":124,"publisher":"MDPI AG","issue":"11","license":[{"start":{"date-parts":[[2026,6,1]],"date-time":"2026-06-01T00:00:00Z","timestamp":1780272000000},"content-version":"vor","delay-in-days":0,"URL":"https:\/\/creativecommons.org\/licenses\/by\/4.0\/"}],"funder":[{"DOI":"10.13039\/501100004504","name":"Research Council of Lithuania","doi-asserted-by":"publisher","award":["S-MIP-24-10"],"award-info":[{"award-number":["S-MIP-24-10"]}],"id":[{"id":"10.13039\/501100004504","id-type":"DOI","asserted-by":"publisher"}]},{"award":["S-MIP-24-10"],"award-info":[{"award-number":["S-MIP-24-10"]}],"id":[{"id":"https:\/\/ror.org\/02gs16m83","id-type":"ROR","asserted-by":"publisher"}]},{"DOI":"10.13039\/501100000923","name":"Australian Research Council","doi-asserted-by":"publisher","award":["DP240103231"],"award-info":[{"award-number":["DP240103231"]}],"id":[{"id":"10.13039\/501100000923","id-type":"DOI","asserted-by":"publisher"}]},{"award":["DP240103231"],"award-info":[{"award-number":["DP240103231"]}],"id":[{"id":"https:\/\/ror.org\/05mmh0f86","id-type":"ROR","asserted-by":"publisher"}]}],"content-domain":{"domain":[],"crossmark-restriction":false},"short-container-title":["Nanomaterials"],"abstract":"<jats:p>Trends in Micro- and Nano-Lithography required for future development of large area applications ranging from high-packing-density electronics to solar cells are surveyed and outlined. Strategies to use direct laser writing to define etch masks over large areas by: (i) fixed beam moving stage and (ii) moving beam moving stage approaches are presented. The extension of planar 2D and stacked 2D (or 2.5D) fabrication methods into 3D micro- and nano-fabrication is discussed. One of the essential future characteristics of 3D nanolithography is real-time feedback capability. This can be realised via inherent 3D-capable holography, which bridges lithographic exposure control, wavefront sensing, and adaptive feedback, providing a pathway to stitch-free, large-area 3D patterning. The future of micro-fabrication is expected to evolve via highly specialised 3D architecture design and reduction in post-processing steps.<\/jats:p>","DOI":"10.3390\/nano16110692","type":"journal-article","created":{"date-parts":[[2026,6,3]],"date-time":"2026-06-03T09:33:14Z","timestamp":1780479194000},"page":"692","update-policy":"https:\/\/doi.org\/10.3390\/mdpi_crossmark_policy","source":"Crossref","is-referenced-by-count":0,"title":["Stitch-Less Lithography Empowered by Multi-Dimensional Holography"],"prefix":"10.3390","volume":"16","author":[{"ORCID":"https:\/\/orcid.org\/0000-0001-6279-2291","authenticated-orcid":false,"given":"Hsin-Hui","family":"Huang","sequence":"first","affiliation":[{"name":"Optical Sciences Centre, Swinburne University of Technology, Melbourne, VIC 3122, Australia"},{"name":"Australian Research Council (ARC), Industrial Transformation Training Centre in Surface Engineering for Advanced Materials (SEAM), Swinburne University of Technology, Melbourne, VIC 3122, Australia"},{"name":"Melbourne Centre for Nanofabrication (MCN), 151 Wellington Road, Melbourne, VIC 3168, Australia"}],"role":[{"vocabulary":"crossref","role":"author"}]},{"ORCID":"https:\/\/orcid.org\/0000-0001-6561-6293","authenticated-orcid":false,"given":"Haoran","family":"Mu","sequence":"additional","affiliation":[{"name":"Optical Sciences Centre, Swinburne University of Technology, Melbourne, VIC 3122, Australia"},{"name":"Melbourne Centre for Nanofabrication (MCN), 151 Wellington Road, Melbourne, VIC 3168, Australia"}],"role":[{"vocabulary":"crossref","role":"author"}]},{"ORCID":"https:\/\/orcid.org\/0009-0002-0692-811X","authenticated-orcid":false,"given":"Eulalia","family":"Puig Vilardell","sequence":"additional","affiliation":[{"name":"Laser Research Center, Physics Faculty, Vilnius University, Saul\u0117tekio Ave. 10, 10223 Vilnius, Lithuania"},{"name":"Institute of Physics, University of Tartu, W. Ostwaldi 1, 50411 Tartu, Estonia"}],"role":[{"vocabulary":"crossref","role":"author"}]},{"ORCID":"https:\/\/orcid.org\/0000-0001-8867-1949","authenticated-orcid":false,"given":"Vijayakumar","family":"Anand","sequence":"additional","affiliation":[{"name":"Optical Sciences Centre, Swinburne University of Technology, Melbourne, VIC 3122, Australia"}],"role":[{"vocabulary":"crossref","role":"author"}]},{"ORCID":"https:\/\/orcid.org\/0000-0002-1453-3276","authenticated-orcid":false,"given":"Darius","family":"Gailevi\u010dius","sequence":"additional","affiliation":[{"name":"Laser Research Center, Physics Faculty, Vilnius University, Saul\u0117tekio Ave. 10, 10223 Vilnius, Lithuania"}],"role":[{"vocabulary":"crossref","role":"author"}]},{"ORCID":"https:\/\/orcid.org\/0000-0003-3542-3874","authenticated-orcid":false,"given":"Saulius","family":"Juodkazis","sequence":"additional","affiliation":[{"name":"Optical Sciences Centre, Swinburne University of Technology, Melbourne, VIC 3122, Australia"},{"name":"Laser Research Center, Physics Faculty, Vilnius University, Saul\u0117tekio Ave. 10, 10223 Vilnius, Lithuania"},{"name":"World Research Hub (WRH), School of Materials and Chemical Technology, Institute of Science Tokyo, 2-12-1, Ookayama, Meguro-ku, Tokyo 152-8550, Japan"}],"role":[{"vocabulary":"crossref","role":"author"}]}],"member":"1968","published-online":{"date-parts":[[2026,6,1]]},"reference":[{"key":"ref_1","first-page":"114","article-title":"Cramming More Components onto Integrated Circuits","volume":"38","author":"Moore","year":"1965","journal-title":"Electronics"},{"key":"ref_2","doi-asserted-by":"crossref","first-page":"202","DOI":"10.1109\/TSM.2010.2096437","article-title":"Fifty Years of Moore\u2019s Law","volume":"24","author":"Mack","year":"2011","journal-title":"IEEE Trans. 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