{"status":"ok","message-type":"work","message-version":"1.0.0","message":{"indexed":{"date-parts":[[2026,9,10]],"date-time":"2026-09-10T10:13:43Z","timestamp":1789035223253,"version":"build-2803163510"},"reference-count":35,"publisher":"MDPI AG","issue":"18","license":[{"start":{"date-parts":[[2026,9,10]],"date-time":"2026-09-10T00:00:00Z","timestamp":1788998400000},"content-version":"vor","delay-in-days":0,"URL":"https:\/\/creativecommons.org\/licenses\/by\/4.0\/"}],"funder":[{"DOI":"10.13039\/501100001665","name":"French National Research Agency","doi-asserted-by":"publisher","award":["ANR-22-CE24-0026-01"],"award-info":[{"award-number":["ANR-22-CE24-0026-01"]}],"id":[{"id":"10.13039\/501100001665","id-type":"DOI","asserted-by":"publisher"}]},{"award":["ANR-22-CE24-0026-01"],"award-info":[{"award-number":["ANR-22-CE24-0026-01"]}],"id":[{"id":"https:\/\/ror.org\/00rbzpz17","id-type":"ROR","asserted-by":"publisher"}]}],"content-domain":{"domain":[],"crossmark-restriction":false},"short-container-title":["Nanomaterials"],"abstract":"<jats:p>We demonstrate a novel method for fabricating densely packed, high-aspect-ratio cavities (depth to diameter ratio &gt; 1) in silicon wafers coated with diamond-like carbon (DLC). The process combines femtosecond laser irradiation with subsequent wet etch (potassium hydroxide-based) or plasma etch (chlorine- and oxygen-based). The femtosecond laser is used to pattern precise openings in the DLC layer, exposing the underlying silicon, which is then rapidly etched to form well-defined cavities. This combined laser ablation and etching approach enables high-throughput fabrication of densely packed micrometer cavities and offers scalability toward industrial production. The resulting hybrid DLC-coated silicon structure, featuring densely packed cavities, may exhibit antireflective properties in the far-infrared spectrum range.<\/jats:p>","DOI":"10.3390\/nano16181131","type":"journal-article","created":{"date-parts":[[2026,9,10]],"date-time":"2026-09-10T09:13:03Z","timestamp":1789031583000},"page":"1131","update-policy":"https:\/\/doi.org\/10.3390\/mdpi_crossmark_policy","source":"Crossref","is-referenced-by-count":0,"title":["Hybrid Laser\u2013Etching Fabrication of High-Density Antireflective Microstructures on DLC-Coated Silicon Using Burst-Mode Bessel Beam Processing"],"prefix":"10.3390","volume":"16","author":[{"ORCID":"https:\/\/orcid.org\/0000-0003-4072-492X","authenticated-orcid":false,"given":"Xxx","family":"Sedao","sequence":"first","affiliation":[{"name":"Laboratoire Hubert Curien, Unit\u00e9 Mixte de Recherche\u2014Centre National de la Recherche Scientifique 5516 (UMR CNRS), Universit\u00e9 Jean Monnet, Universit\u00e9 de Lyon, 42000 Saint-Etienne, France"}],"role":[{"vocabulary":"crossref","role":"author"}]},{"ORCID":"https:\/\/orcid.org\/0000-0002-9625-1167","authenticated-orcid":false,"given":"Javier","family":"Prada-Rodrigo","sequence":"additional","affiliation":[{"name":"Laboratoire Hubert Curien, Unit\u00e9 Mixte de Recherche\u2014Centre National de la Recherche Scientifique 5516 (UMR CNRS), Universit\u00e9 Jean Monnet, Universit\u00e9 de Lyon, 42000 Saint-Etienne, France"},{"name":"Grupo PEASER, Instituto de \u00d3ptica (CSIC), C\/Serrano, 121, 28006 Madrid, Spain"}],"role":[{"vocabulary":"crossref","role":"author"}]},{"ORCID":"https:\/\/orcid.org\/0009-0001-3258-5766","authenticated-orcid":false,"given":"Agathe","family":"Cavanna","sequence":"additional","affiliation":[{"name":"Laboratoire Hubert Curien, Unit\u00e9 Mixte de Recherche\u2014Centre National de la Recherche Scientifique 5516 (UMR CNRS), Universit\u00e9 Jean Monnet, Universit\u00e9 de Lyon, 42000 Saint-Etienne, France"},{"name":"Centre National de la Recherche Scientifique (CNRS), Ecole Centrale Lyon (ECL), Institut National des Sciences Appliqu\u00e9es (INSA) Lyon, Universit\u00e9 Claude Bernard Lyon 1, \u00c9cole Sup\u00e9rieure de Chimie Physique \u00c9lectronique de Lyon (CPE) Lyon, Institut des Nanotechnologies de Lyon (INL), Unit\u00e9 Mixte de Recherche (UMR) 5270, 69134 Ecully, France"}],"role":[{"vocabulary":"crossref","role":"author"}]},{"ORCID":"https:\/\/orcid.org\/0009-0004-7734-4685","authenticated-orcid":false,"given":"Ionut-Alexandru","family":"Bunea","sequence":"additional","affiliation":[{"name":"Laboratoire Hubert Curien, Unit\u00e9 Mixte de Recherche\u2014Centre National de la Recherche Scientifique 5516 (UMR CNRS), Universit\u00e9 Jean Monnet, Universit\u00e9 de Lyon, 42000 Saint-Etienne, France"},{"name":"National Institute of Laser, Plasma and Radiation Physics, Str. Atomistilor, 409, 077125 Magurele, Romania"}],"role":[{"vocabulary":"crossref","role":"author"}]},{"given":"Antoine","family":"Gonon","sequence":"additional","affiliation":[{"name":"Groupement d\u2019Int\u00e9r\u00eat \u00c9conomique (GIE) Manutech-USD, 20 Rue Prof Benoit Lauras, 42000 Saint-Etienne, France"}],"role":[{"vocabulary":"crossref","role":"author"}]},{"given":"William","family":"Ravisy","sequence":"additional","affiliation":[{"name":"Institut de Recherches en Ing\u00e9nierie des mat\u00e9riaux de Surface, IREIS, HEF Groupe, Av. Beno\u00eet Fourneyron, 42160 Andr\u00e9zieux-Bouth\u00e9on, France"}],"role":[{"vocabulary":"crossref","role":"author"}]},{"ORCID":"https:\/\/orcid.org\/0000-0002-2759-5716","authenticated-orcid":false,"given":"Yannick","family":"Bleu","sequence":"additional","affiliation":[{"name":"Laboratoire Hubert Curien, Unit\u00e9 Mixte de Recherche\u2014Centre National de la Recherche Scientifique 5516 (UMR CNRS), Universit\u00e9 Jean Monnet, Universit\u00e9 de Lyon, 42000 Saint-Etienne, France"}],"role":[{"vocabulary":"crossref","role":"author"}]},{"given":"Christian","family":"Seassal","sequence":"additional","affiliation":[{"name":"Centre National de la Recherche Scientifique (CNRS), Ecole Centrale Lyon (ECL), Institut National des Sciences Appliqu\u00e9es (INSA) Lyon, Universit\u00e9 Claude Bernard Lyon 1, \u00c9cole Sup\u00e9rieure de Chimie Physique \u00c9lectronique de Lyon (CPE) Lyon, Institut des Nanotechnologies de Lyon (INL), Unit\u00e9 Mixte de Recherche (UMR) 5270, 69134 Ecully, France"}],"role":[{"vocabulary":"crossref","role":"author"}]},{"given":"Yves","family":"Jourlin","sequence":"additional","affiliation":[{"name":"Laboratoire Hubert Curien, Unit\u00e9 Mixte de Recherche\u2014Centre National de la Recherche Scientifique 5516 (UMR CNRS), Universit\u00e9 Jean Monnet, Universit\u00e9 de Lyon, 42000 Saint-Etienne, France"}],"role":[{"vocabulary":"crossref","role":"author"}]},{"given":"Laurent","family":"Dubost","sequence":"additional","affiliation":[{"name":"Institut de Recherches en Ing\u00e9nierie des mat\u00e9riaux de Surface, IREIS, HEF Groupe, Av. Beno\u00eet Fourneyron, 42160 Andr\u00e9zieux-Bouth\u00e9on, France"}],"role":[{"vocabulary":"crossref","role":"author"}]},{"given":"Nicolas","family":"Crespo-Monteiro","sequence":"additional","affiliation":[{"name":"Laboratoire Hubert Curien, Unit\u00e9 Mixte de Recherche\u2014Centre National de la Recherche Scientifique 5516 (UMR CNRS), Universit\u00e9 Jean Monnet, Universit\u00e9 de Lyon, 42000 Saint-Etienne, France"}],"role":[{"vocabulary":"crossref","role":"author"}]},{"given":"Razvan","family":"Stoian","sequence":"additional","affiliation":[{"name":"Laboratoire Hubert Curien, Unit\u00e9 Mixte de Recherche\u2014Centre National de la Recherche Scientifique 5516 (UMR CNRS), Universit\u00e9 Jean Monnet, Universit\u00e9 de Lyon, 42000 Saint-Etienne, France"}],"role":[{"vocabulary":"crossref","role":"author"}]},{"given":"Yoan","family":"Di Maio","sequence":"additional","affiliation":[{"name":"Groupement d\u2019Int\u00e9r\u00eat \u00c9conomique (GIE) Manutech-USD, 20 Rue Prof Benoit Lauras, 42000 Saint-Etienne, France"}],"role":[{"vocabulary":"crossref","role":"author"}]},{"given":"Claire","family":"Deeb","sequence":"additional","affiliation":[{"name":"Thales Research and Technology, Campus Polytechnique, 1 Avenue Augustin Fresnel, 91767 Palaiseau, France"}],"role":[{"vocabulary":"crossref","role":"author"}]},{"ORCID":"https:\/\/orcid.org\/0000-0002-5764-9674","authenticated-orcid":false,"given":"Isabelle","family":"Verrier","sequence":"additional","affiliation":[{"name":"Laboratoire Hubert Curien, Unit\u00e9 Mixte de Recherche\u2014Centre National de la Recherche Scientifique 5516 (UMR CNRS), Universit\u00e9 Jean Monnet, Universit\u00e9 de Lyon, 42000 Saint-Etienne, France"}],"role":[{"vocabulary":"crossref","role":"author"}]},{"ORCID":"https:\/\/orcid.org\/0000-0001-6524-5357","authenticated-orcid":false,"given":"Emilie","family":"Gamet","sequence":"additional","affiliation":[{"name":"Laboratoire Hubert Curien, Unit\u00e9 Mixte de Recherche\u2014Centre National de la Recherche Scientifique 5516 (UMR CNRS), Universit\u00e9 Jean Monnet, Universit\u00e9 de Lyon, 42000 Saint-Etienne, France"}],"role":[{"vocabulary":"crossref","role":"author"}]}],"member":"1968","published-online":{"date-parts":[[2026,9,10]]},"reference":[{"key":"ref_1","doi-asserted-by":"crossref","first-page":"15893","DOI":"10.1038\/s41598-023-42387-5","article-title":"Key topographic parameters driving surface adhesion of Porphyromonas gingivalis","volume":"13","author":"Papa","year":"2023","journal-title":"Sci. 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