{"status":"ok","message-type":"work","message-version":"1.0.0","message":{"indexed":{"date-parts":[[2026,8,18]],"date-time":"2026-08-18T05:06:28Z","timestamp":1787029588222,"version":"build-2736575974"},"reference-count":39,"publisher":"MDPI AG","issue":"19","license":[{"start":{"date-parts":[[2021,10,6]],"date-time":"2021-10-06T00:00:00Z","timestamp":1633478400000},"content-version":"vor","delay-in-days":0,"URL":"https:\/\/creativecommons.org\/licenses\/by\/4.0\/"}],"funder":[{"DOI":"10.13039\/501100006769","name":"Russian Science Foundation","doi-asserted-by":"publisher","award":["17-19-01721-P"],"award-info":[{"award-number":["17-19-01721-P"]}],"id":[{"id":"10.13039\/501100006769","id-type":"DOI","asserted-by":"publisher"}]}],"content-domain":{"domain":[],"crossmark-restriction":false},"short-container-title":["Sensors"],"abstract":"<jats:p>The research and development of methods using of the specialized diffractive microstructure sensors embedded in the pattern of computer-generated holograms (CGH) manufactured on circular and X-Y laser writing systems is discussed. These microstructures consist of two parts: one of which is written before the CGH in the field of future hologram and the second one is written during the long-term writing of the CGH. The shift between the first and second part of the microstructure is the trace of the writing errors and allows one to determine and calculate the error of CGH fabrication along both orthogonal coordinates. The developed method is based on the principle of diffraction-based overlay with 1D and 2D built-in diffractive microstructure-sensors. Mathematical modeling and results of experimental test writings of such diffractive microstructure sensors are described. The efficiency of using these types of build-in sensors for the writing errors estimation for CGHs is demonstrated.<\/jats:p>","DOI":"10.3390\/s21196635","type":"journal-article","created":{"date-parts":[[2021,10,10]],"date-time":"2021-10-10T21:37:49Z","timestamp":1633901869000},"page":"6635","update-policy":"https:\/\/doi.org\/10.3390\/mdpi_crossmark_policy","source":"Crossref","is-referenced-by-count":4,"title":["Diffractive Sensor Elements for Registration of Long-Term Instability at Writing of Computer-Generated Holograms"],"prefix":"10.3390","volume":"21","author":[{"ORCID":"https:\/\/orcid.org\/0000-0002-5466-2371","authenticated-orcid":false,"given":"Ruslan V.","family":"Shimansky","sequence":"first","affiliation":[{"name":"Institute of Automation and Electrometry SB RAS, 630090 Novosibirsk, Russia"}],"role":[{"vocabulary":"crossref","role":"author"}]},{"ORCID":"https:\/\/orcid.org\/0000-0002-4284-5576","authenticated-orcid":false,"given":"Dmitrij A.","family":"Belousov","sequence":"additional","affiliation":[{"name":"Institute of Automation and Electrometry SB RAS, 630090 Novosibirsk, Russia"}],"role":[{"vocabulary":"crossref","role":"author"}]},{"ORCID":"https:\/\/orcid.org\/0000-0002-1278-9884","authenticated-orcid":false,"given":"Victor P.","family":"Korolkov","sequence":"additional","affiliation":[{"name":"Institute of Automation and Electrometry SB RAS, 630090 Novosibirsk, Russia"}],"role":[{"vocabulary":"crossref","role":"author"}]},{"given":"Roman I.","family":"Kuts","sequence":"additional","affiliation":[{"name":"Institute of Automation and Electrometry SB RAS, 630090 Novosibirsk, Russia"}],"role":[{"vocabulary":"crossref","role":"author"}]}],"member":"1968","published-online":{"date-parts":[[2021,10,6]]},"reference":[{"key":"ref_1","unstructured":"Herzig, H. (1997). Direct writing of continuous-relief micro-optics. Micro-Optics: Elements, Systems and Applications, CRC Press. [1st ed.]. Chapter 2."},{"key":"ref_2","doi-asserted-by":"crossref","first-page":"781","DOI":"10.1117\/12.61207","article-title":"Synthetic holograms written by a laser pattern generator","volume":"32","author":"Krackhardt","year":"1993","journal-title":"Opt. Eng."},{"key":"ref_3","doi-asserted-by":"crossref","first-page":"3754","DOI":"10.1364\/AO.28.003754","article-title":"Laser scanner for direct writing lithography","volume":"28","author":"Rensch","year":"1989","journal-title":"Appl. Opt."},{"key":"ref_4","first-page":"257","article-title":"Fabrication of kinoform optical elements","volume":"67","author":"Koronkevich","year":"1984","journal-title":"Optik"},{"key":"ref_5","first-page":"83","article-title":"Testing of aspherics by means of rotational-symmetric synthetic holograms","volume":"6","author":"Schwider","year":"1976","journal-title":"Opt. Appl."},{"key":"ref_6","doi-asserted-by":"crossref","first-page":"290","DOI":"10.1016\/0141-6359(94)90006-X","article-title":"An instrument for manufacturing zone-plates by using a lathe","volume":"16","author":"Nomura","year":"1994","journal-title":"Precis. Eng."},{"key":"ref_7","doi-asserted-by":"crossref","first-page":"8970","DOI":"10.1364\/AO.36.008970","article-title":"Generation of large-diameter diffractive elements with laser pattern generation","volume":"36","author":"Bowen","year":"1997","journal-title":"Appl. Opt."},{"key":"ref_8","doi-asserted-by":"crossref","first-page":"362","DOI":"10.1117\/12.269059","article-title":"Measurement of large convex aspheres","volume":"Volume 2871","author":"Burge","year":"1997","journal-title":"Optical Telescopes of Today and Tomorrow"},{"key":"ref_9","doi-asserted-by":"crossref","first-page":"063403","DOI":"10.1117\/1.OE.52.6.063403","article-title":"Ultraviolet laser writing system based on polar scanning strategy to produce subwavelength metal gratings for surface plasmon resonance","volume":"52","author":"Jun","year":"2013","journal-title":"Opt. Eng."},{"key":"ref_10","doi-asserted-by":"crossref","first-page":"1032","DOI":"10.3938\/jkps.50.1032","article-title":"Diffractive Optics Fabrication System for Large Aspheric Surface Testing","volume":"50","author":"Rhee","year":"2007","journal-title":"J. Korean Phys. Soc."},{"key":"ref_11","doi-asserted-by":"crossref","first-page":"756","DOI":"10.18287\/2412-6179-2019-43-5-756-764","article-title":"Design, fabrication and investigation of a subwavelength axicon for terahertz beam polarization transforming","volume":"43","author":"Khonina","year":"2019","journal-title":"Comput. Opt."},{"key":"ref_12","doi-asserted-by":"crossref","first-page":"160","DOI":"10.1088\/1464-4258\/9\/2\/007","article-title":"Diffractive axicons fabricated by laser direct writer on curved surface","volume":"9","author":"Lu","year":"2007","journal-title":"J. Opt. A. Pure Appl. Opt."},{"key":"ref_13","doi-asserted-by":"crossref","first-page":"873","DOI":"10.1117\/12.484473","article-title":"Metrological features of diffractive high-efficiency objectives for laser interferometry","volume":"Volume 4900","author":"Pruss","year":"2002","journal-title":"Seventh International Symposium on Laser Metrology Applied to Science, Industry, and Everyday Life"},{"key":"ref_14","doi-asserted-by":"crossref","first-page":"1810","DOI":"10.1364\/OPEX.12.001810","article-title":"Lithographic fabrication of large curved hologram by laser writer","volume":"12","author":"Xie","year":"2004","journal-title":"Opt. Express"},{"key":"ref_15","first-page":"3","article-title":"Methods for minimizing the errors in direct laser writing of diffractive optical elements","volume":"38","author":"Poleshchuk","year":"2002","journal-title":"Optoelectron. Instrum. Proc."},{"key":"ref_16","doi-asserted-by":"crossref","first-page":"1109","DOI":"10.1364\/AO.54.001109","article-title":"Humidity coefficient correction in the calculation equations of air refractive index by He\u2013Ne laser based on phase step interferometry","volume":"54","author":"Chen","year":"2015","journal-title":"Appl. Opt."},{"key":"ref_17","doi-asserted-by":"crossref","first-page":"123","DOI":"10.3103\/S8756699017020030","article-title":"Alignment of the writing beam with the diffractive structure rotation axis in synthesis of diffractive optical elements in a polar coordinate system","volume":"53","author":"Shimanskii","year":"2017","journal-title":"Optoelectron. Instrum. Proc."},{"key":"ref_18","unstructured":"Poleshchuk, A.G., and Korolkov, V.P. (2006, January 9\u201311). Fabrication and certification of high-quality and large-aperture CGHs for optical testing. Proceedings of the EOS Topical Meeting on Diffractive Optics, Rochester, NY, USA."},{"key":"ref_19","first-page":"100","article-title":"Certification of diffractive optical elements for aspherical optics testing","volume":"41","author":"Nasyrov","year":"2005","journal-title":"Optoelectron. Instrum. Proc."},{"key":"ref_20","first-page":"12","article-title":"Measurement and correction of the laser beam trajectory in circular writing systems","volume":"39","author":"Korolkov","year":"2003","journal-title":"Optoelectron. Instrum. Proc."},{"key":"ref_21","first-page":"460","article-title":"Performance improvement of CGHs for optical testing","volume":"Volume 5144","author":"Korolkov","year":"2003","journal-title":"Optical Measurement Systems for Industrial Inspection III"},{"key":"ref_22","doi-asserted-by":"crossref","unstructured":"Korolkov, V.P., Poleshchuk, A.G., Cherkashin, V.V., and Burge, J. (2002, January 3\u20136). Methods for certification of CGH fabrication. Proceedings of the OSA Topical Meeting \u201cDOMO-2002\u201d, Trends in Optics and Photonics, Tucson, AZ, USA.","DOI":"10.1364\/DOMO.2002.DMD6"},{"key":"ref_23","first-page":"42","article-title":"Generation of diffractive optical elements in the polar coordinate system: Fabrication errors and their measurement","volume":"6","author":"Poleshchuk","year":"1997","journal-title":"Optoelectron. Instrum. Proc."},{"key":"ref_24","doi-asserted-by":"crossref","first-page":"1715","DOI":"10.1080\/09500349708230771","article-title":"Low-cost direct writing lithography system for the sub-micron range","volume":"44","author":"Becker","year":"1997","journal-title":"J. Mod. Opt."},{"key":"ref_25","doi-asserted-by":"crossref","first-page":"358","DOI":"10.1117\/12.369209","article-title":"Error analysis for CGH optical testing","volume":"Volume 3782","author":"Burge","year":"1999","journal-title":"Optical Manufacturing and Testing III"},{"key":"ref_26","doi-asserted-by":"crossref","first-page":"168","DOI":"10.1117\/12.274415","article-title":"Processing parameter optimization for thermochemical writing of DOEs on chromium films","volume":"Volume 3010","author":"Cherkashin","year":"1997","journal-title":"Diffractive and Holographic Device Technologies and Applications IV"},{"key":"ref_27","doi-asserted-by":"crossref","first-page":"631","DOI":"10.1070\/QE2011v041n07ABEH014528","article-title":"Study of the spatial resolution of laser thermochemical technology for recording diffraction microstructures","volume":"41","author":"Veiko","year":"2011","journal-title":"Quantum Elec."},{"key":"ref_28","doi-asserted-by":"crossref","first-page":"1297","DOI":"10.1016\/S0022-3093(05)80361-8","article-title":"High resolution optical recording on a-Si films","volume":"137","author":"Gotchiyaev","year":"1991","journal-title":"J. Non-Cryst. Solids"},{"key":"ref_29","doi-asserted-by":"crossref","first-page":"517","DOI":"10.3103\/S8756699017050119","article-title":"Manufacturing and certification of a diffraction corrector for controlling the surface shape of the six-meter main mirror of the Big Azimuthal Telescope of the Russian Academy of Sciences","volume":"53","author":"Nasyrov","year":"2017","journal-title":"Optoelectron. Instrum. Proc."},{"key":"ref_30","doi-asserted-by":"crossref","first-page":"303","DOI":"10.3103\/S8756699019030130","article-title":"Error measurement method in the fabrication of precision synthesized holograms on circular laser writing systems","volume":"55","author":"Shimansky","year":"2019","journal-title":"Optoelectron. Instrum. Proc."},{"key":"ref_31","first-page":"115510L","article-title":"Measuring fabrication errors of computer-generated holograms using embedded microgratings","volume":"Volume 11551","author":"Shimansky","year":"2020","journal-title":"Holography, Diffractive Optics, and Applications X"},{"key":"ref_32","doi-asserted-by":"crossref","first-page":"122403","DOI":"10.1088\/1674-4926\/40\/12\/122403","article-title":"Selection of DBO measurement wavelength for bottom mark asymmetry based on FDTD method","volume":"40","author":"Xu","year":"2019","journal-title":"J. Semicond."},{"key":"ref_33","doi-asserted-by":"crossref","first-page":"8491","DOI":"10.1364\/OE.25.008491","article-title":"Robust overlay metrology with differential Mueller matrix calculus","volume":"25","author":"Chen","year":"2017","journal-title":"Opt. Express"},{"key":"ref_34","first-page":"020101","article-title":"Publication guidelines for metrology and masks","volume":"20","author":"Levinson","year":"2021","journal-title":"J. Micro\/Nanopatterning Mater. Metrol."},{"key":"ref_35","first-page":"118710I","article-title":"Controlling the accuracy of fabricating computer-generated holograms on circular and X-Y laser writing systems","volume":"Volume 11871","author":"Shimansky","year":"2021","journal-title":"Optical Design and Engineering VIII"},{"key":"ref_36","unstructured":"(2021, September 08). Diffraction Optics Simulation and Design from KJ Innovation. Available online: https:\/\/kjinnovation.com."},{"key":"ref_37","unstructured":"(2021, September 08). MATLAB\u2014MathWorks\u2014MATLAB & Simulink. Available online: https:\/\/www.mathworks.com\/products\/matlab.html."},{"key":"ref_38","unstructured":"(2021, September 28). DWL66+. Available online: https:\/\/heidelberg-instruments.com\/product\/dwl-66-laser-lithography-system\/."},{"key":"ref_39","doi-asserted-by":"crossref","first-page":"139","DOI":"10.3103\/S8756699018020048","article-title":"Device for Characterization of the Diffraction Pattern of Computer-Generated Holograms in a Wide Angular Range","volume":"54","author":"Belousov","year":"2018","journal-title":"Optoelectron. Instrum. Proc."}],"container-title":["Sensors"],"original-title":[],"language":"en","link":[{"URL":"https:\/\/www.mdpi.com\/1424-8220\/21\/19\/6635\/pdf","content-type":"unspecified","content-version":"vor","intended-application":"similarity-checking"}],"deposited":{"date-parts":[[2025,10,11]],"date-time":"2025-10-11T07:09:52Z","timestamp":1760166592000},"score":1,"resource":{"primary":{"URL":"https:\/\/www.mdpi.com\/1424-8220\/21\/19\/6635"}},"subtitle":[],"short-title":[],"issued":{"date-parts":[[2021,10,6]]},"references-count":39,"journal-issue":{"issue":"19","published-online":{"date-parts":[[2021,10]]}},"alternative-id":["s21196635"],"URL":"https:\/\/doi.org\/10.3390\/s21196635","relation":{},"ISSN":["1424-8220"],"issn-type":[{"value":"1424-8220","type":"electronic"}],"subject":[],"published":{"date-parts":[[2021,10,6]]}}}