{"status":"ok","message-type":"work","message-version":"1.0.0","message":{"indexed":{"date-parts":[[2026,3,20]],"date-time":"2026-03-20T02:25:10Z","timestamp":1773973510153,"version":"3.50.1"},"reference-count":14,"publisher":"MDPI AG","issue":"3","license":[{"start":{"date-parts":[[2025,1,21]],"date-time":"2025-01-21T00:00:00Z","timestamp":1737417600000},"content-version":"vor","delay-in-days":0,"URL":"https:\/\/creativecommons.org\/licenses\/by\/4.0\/"}],"funder":[{"DOI":"10.13039\/501100016047","name":"Science Fund of the Republic of Serbia","doi-asserted-by":"publisher","award":["7754287"],"award-info":[{"award-number":["7754287"]}],"id":[{"id":"10.13039\/501100016047","id-type":"DOI","asserted-by":"publisher"}]},{"DOI":"10.13039\/501100016047","name":"Science Fund of the Republic of Serbia","doi-asserted-by":"publisher","award":["451-03-66\/2024-03\/200026"],"award-info":[{"award-number":["451-03-66\/2024-03\/200026"]}],"id":[{"id":"10.13039\/501100016047","id-type":"DOI","asserted-by":"publisher"}]},{"name":"MEMS Multisensor Instrument for Aerodynamic Pressure Measurements\u2014MEMSAERO","award":["7754287"],"award-info":[{"award-number":["7754287"]}]},{"name":"MEMS Multisensor Instrument for Aerodynamic Pressure Measurements\u2014MEMSAERO","award":["451-03-66\/2024-03\/200026"],"award-info":[{"award-number":["451-03-66\/2024-03\/200026"]}]},{"name":"Ministry of Science, Technological Development and Innovation of the Republic of Serbia","award":["7754287"],"award-info":[{"award-number":["7754287"]}]},{"name":"Ministry of Science, Technological Development and Innovation of the Republic of Serbia","award":["451-03-66\/2024-03\/200026"],"award-info":[{"award-number":["451-03-66\/2024-03\/200026"]}]}],"content-domain":{"domain":[],"crossmark-restriction":false},"short-container-title":["Sensors"],"abstract":"<jats:p>The key equipment for performing aerodynamic testing of objects, such as road and railway vehicles, aircraft, and wind turbines, as well as stationary objects such as bridges and buildings, are multichannel pressure measurement instruments (pressure scanners). These instruments are typically based on arrays of separate pressure sensors built in an enclosure that also contains temperature sensors used for temperature compensation. However, there are significant limitations to such a construction, especially when increasing requirements in terms of miniaturization, the number of pressure channels, and high measurement performance must be met at the same time. In this paper, we present the development and realization of an innovative MEMS multisensor chip, which is designed with the intention of overcoming these limitations. The chip has four MEMS piezoresistive pressure-sensing elements and two resistive temperature-sensing elements, which are all monolithically integrated, enabling better sensor matching and thermal coupling while providing a high number of pressure channels per unit area. The main steps of chip development are preliminary chip design, numerical simulations of the chip\u2019s mechanical behavior when exposed to the measured pressure, final chip design, fabrication processes (photolithography, thermal oxidation, diffusion, layer deposition, micromachining, anodic bonding, and wafer dicing), and electrical testing.<\/jats:p>","DOI":"10.3390\/s25030600","type":"journal-article","created":{"date-parts":[[2025,1,21]],"date-time":"2025-01-21T05:47:42Z","timestamp":1737438462000},"page":"600","update-policy":"https:\/\/doi.org\/10.3390\/mdpi_crossmark_policy","source":"Crossref","is-referenced-by-count":5,"title":["Novel MEMS Multisensor Chip for Aerodynamic Pressure Measurements"],"prefix":"10.3390","volume":"25","author":[{"given":"\u017darko","family":"Lazi\u0107","sequence":"first","affiliation":[{"name":"Institute of Chemistry, Technology and Metallurgy (ICTM), National Institute of the Republic of Serbia, University of Belgrade, Njego\u0161eva 12, 11000 Belgrade, Serbia"}],"role":[{"role":"author","vocabulary":"crossref"}]},{"given":"Mil\u010de M.","family":"Smiljani\u0107","sequence":"additional","affiliation":[{"name":"Institute of Chemistry, Technology and Metallurgy (ICTM), National Institute of the Republic of Serbia, University of Belgrade, Njego\u0161eva 12, 11000 Belgrade, Serbia"}],"role":[{"role":"author","vocabulary":"crossref"}]},{"given":"Dragan","family":"Tanaskovi\u0107","sequence":"additional","affiliation":[{"name":"Institute of Chemistry, Technology and Metallurgy (ICTM), National Institute of the Republic of Serbia, University of Belgrade, Njego\u0161eva 12, 11000 Belgrade, Serbia"}],"role":[{"role":"author","vocabulary":"crossref"}]},{"ORCID":"https:\/\/orcid.org\/0000-0001-8170-746X","authenticated-orcid":false,"given":"Milena","family":"Ra\u0161lji\u0107-Rafajilovi\u0107","sequence":"additional","affiliation":[{"name":"Institute of Chemistry, Technology and Metallurgy (ICTM), National Institute of the Republic of Serbia, University of Belgrade, Njego\u0161eva 12, 11000 Belgrade, Serbia"}],"role":[{"role":"author","vocabulary":"crossref"}]},{"ORCID":"https:\/\/orcid.org\/0000-0002-8547-1172","authenticated-orcid":false,"given":"Katarina","family":"Cvetanovi\u0107","sequence":"additional","affiliation":[{"name":"Institute of Chemistry, Technology and Metallurgy (ICTM), National Institute of the Republic of Serbia, University of Belgrade, Njego\u0161eva 12, 11000 Belgrade, Serbia"}],"role":[{"role":"author","vocabulary":"crossref"}]},{"ORCID":"https:\/\/orcid.org\/0000-0001-9860-1936","authenticated-orcid":false,"given":"Evgenija","family":"Milinkovi\u0107","sequence":"additional","affiliation":[{"name":"Institute of Chemistry, Technology and Metallurgy (ICTM), National Institute of the Republic of Serbia, University of Belgrade, Njego\u0161eva 12, 11000 Belgrade, Serbia"}],"role":[{"role":"author","vocabulary":"crossref"}]},{"ORCID":"https:\/\/orcid.org\/0000-0003-1428-9346","authenticated-orcid":false,"given":"Marko V.","family":"Bo\u0161kovi\u0107","sequence":"additional","affiliation":[{"name":"Institute of Chemistry, Technology and Metallurgy (ICTM), National Institute of the Republic of Serbia, University of Belgrade, Njego\u0161eva 12, 11000 Belgrade, Serbia"}],"role":[{"role":"author","vocabulary":"crossref"}]},{"given":"Stevan","family":"Andri\u0107","sequence":"additional","affiliation":[{"name":"Institute of Chemistry, Technology and Metallurgy (ICTM), National Institute of the Republic of Serbia, University of Belgrade, Njego\u0161eva 12, 11000 Belgrade, Serbia"}],"role":[{"role":"author","vocabulary":"crossref"}]},{"given":"Ivana","family":"Joki\u0107","sequence":"additional","affiliation":[{"name":"Institute of Chemistry, Technology and Metallurgy (ICTM), National Institute of the Republic of Serbia, University of Belgrade, Njego\u0161eva 12, 11000 Belgrade, Serbia"}],"role":[{"role":"author","vocabulary":"crossref"}]},{"ORCID":"https:\/\/orcid.org\/0000-0001-9810-8957","authenticated-orcid":false,"given":"Predrag","family":"Poljak","sequence":"additional","affiliation":[{"name":"Institute of Chemistry, Technology and Metallurgy (ICTM), National Institute of the Republic of Serbia, University of Belgrade, Njego\u0161eva 12, 11000 Belgrade, Serbia"}],"role":[{"role":"author","vocabulary":"crossref"}]},{"given":"Milo\u0161","family":"Frantlovi\u0107","sequence":"additional","affiliation":[{"name":"Institute of Chemistry, Technology and Metallurgy (ICTM), National Institute of the Republic of Serbia, University of Belgrade, Njego\u0161eva 12, 11000 Belgrade, Serbia"}],"role":[{"role":"author","vocabulary":"crossref"}]}],"member":"1968","published-online":{"date-parts":[[2025,1,21]]},"reference":[{"key":"ref_1","first-page":"1","article-title":"Automotive Aerodynamics Sensing Using Low-Profile Pressure Sensor Strip","volume":"72","author":"Zhang","year":"2023","journal-title":"IEEE Trans. Instrum. Meas."},{"key":"ref_2","doi-asserted-by":"crossref","unstructured":"Cellucci, D., Cramer, N., and Swei, S.S.-M. (2023, January 1\u20135). Distributed Pressure Sensing for Enabling Self-Aware Autonomous Aerial Vehicles. Proceedings of the 2018 IEEE\/RSJ International Conference on Intelligent Robots and Systems (IROS), Madrid, Spain.","DOI":"10.1109\/IROS.2018.8593664"},{"key":"ref_3","doi-asserted-by":"crossref","first-page":"715","DOI":"10.1109\/JSEN.2022.3224307","article-title":"Aerosense: A Self-Sustainable and Long-Range Bluetooth Wireless Sensor Node for Aerodynamic and Aeroacoustic Monitoring on Wind Turbines","volume":"23","author":"Polonelli","year":"2022","journal-title":"IEEE Sensors J."},{"key":"ref_4","doi-asserted-by":"crossref","unstructured":"Scharer, N., Polonelli, T., Deparday, J., and Magno, M. (2023, January 20\u201323). Towards a non-Invasive Monitoring System for Wind Turbine Blades. In Proceeding of the 2024 IEEE International Instrumentation and Measurement Technology Conference (I2MTC), Glasgow, UK.","DOI":"10.1109\/I2MTC60896.2024.10561240"},{"key":"ref_5","doi-asserted-by":"crossref","first-page":"106855","DOI":"10.1016\/j.jobe.2023.106855","article-title":"Optimal sensor placement for reconstructing wind pressure field around buildings using compressed sensing","volume":"75","author":"Luo","year":"2023","journal-title":"J. Build. Eng."},{"key":"ref_6","doi-asserted-by":"crossref","first-page":"156","DOI":"10.1016\/j.sna.2018.07.006","article-title":"Theory, technology and applications of piezoresistive sensors: A review","volume":"281","author":"Fiorillo","year":"2018","journal-title":"Sensors Actuators A: Phys."},{"key":"ref_7","doi-asserted-by":"crossref","unstructured":"Song, P., Ma, Z., Ma, J., Yang, L., Wei, J., Zhao, Y., Zhang, M., Yang, F., and Wang, X. (2020). Recent Progress of Miniature MEMS Pressure Sensors. Micromachines, 11.","DOI":"10.3390\/mi11010056"},{"key":"ref_8","doi-asserted-by":"crossref","first-page":"1","DOI":"10.1038\/s41378-023-00620-1","article-title":"Advances in high-performance MEMS pressure sensors: Design, fabrication, and packaging","volume":"9","author":"Han","year":"2023","journal-title":"Microsyst. Nanoeng."},{"key":"ref_9","doi-asserted-by":"crossref","unstructured":"Fan, X., Wang, L., and Zhang, S. (2024). A High-Performance Micro Differential Pressure Sensor. Micromachines, 15.","DOI":"10.3390\/mi15111396"},{"key":"ref_10","doi-asserted-by":"crossref","first-page":"779","DOI":"10.1109\/JMEMS.2013.2245400","article-title":"Integrated Multifunctional Environmental Sensors","volume":"22","author":"Roozeboom","year":"2013","journal-title":"J. Microelectromech. Syst."},{"key":"ref_11","doi-asserted-by":"crossref","unstructured":"Zhang, J., Chen, J., Li, M., Ge, Y., Wang, T., Shan, P., and Mao, X. (2018). Design, Fabrication, and Implementation of an Array-Type MEMS Piezoresistive Intelligent Pressure Sensor System. Micromachines, 9.","DOI":"10.3390\/mi9030104"},{"key":"ref_12","doi-asserted-by":"crossref","first-page":"175","DOI":"10.1016\/0924-4247(90)80053-8","article-title":"Experimental determination of silicon pressure sensor diaphragm deflection","volume":"24","year":"1990","journal-title":"Sensors Actuators A Phys."},{"key":"ref_13","first-page":"951","article-title":"Investigation of impurity distribution for pressure sensor piezoresistors","volume":"58","author":"Totovski","year":"1993","journal-title":"J. Serb. Chem. Soc."},{"key":"ref_14","doi-asserted-by":"crossref","unstructured":"Lazi\u0107, \u017d., Smiljani\u0107, M.M., Tanaskovi\u0107, D., Ra\u0161lji\u0107-Rafajilovi\u0107, M., Cvetanovi\u0107, K., Milinkovi\u0107, E., Bo\u0161kovi\u0107, M.V., Andri\u0107, S., Poljak, P., and Frantlovi\u0107, M. (2023, January 15\u201330). Development of a MEMS Multisensor Chip for Aerodynamic Pressure Measurements. Proceedings of the 10th International Electronic Conference on Sensors and Applications (ECSA 2023), Online.","DOI":"10.3390\/ecsa-10-16071"}],"container-title":["Sensors"],"original-title":[],"language":"en","link":[{"URL":"https:\/\/www.mdpi.com\/1424-8220\/25\/3\/600\/pdf","content-type":"unspecified","content-version":"vor","intended-application":"similarity-checking"}],"deposited":{"date-parts":[[2025,10,8]],"date-time":"2025-10-08T10:32:39Z","timestamp":1759919559000},"score":1,"resource":{"primary":{"URL":"https:\/\/www.mdpi.com\/1424-8220\/25\/3\/600"}},"subtitle":[],"short-title":[],"issued":{"date-parts":[[2025,1,21]]},"references-count":14,"journal-issue":{"issue":"3","published-online":{"date-parts":[[2025,2]]}},"alternative-id":["s25030600"],"URL":"https:\/\/doi.org\/10.3390\/s25030600","relation":{},"ISSN":["1424-8220"],"issn-type":[{"value":"1424-8220","type":"electronic"}],"subject":[],"published":{"date-parts":[[2025,1,21]]}}}