{"status":"ok","message-type":"work","message-version":"1.0.0","message":{"indexed":{"date-parts":[[2026,10,16]],"date-time":"2026-10-16T15:13:45Z","timestamp":1792163625644,"version":"4.4.0"},"reference-count":198,"publisher":"MDPI AG","issue":"7","license":[{"start":{"date-parts":[[2025,3,22]],"date-time":"2025-03-22T00:00:00Z","timestamp":1742601600000},"content-version":"vor","delay-in-days":0,"URL":"https:\/\/creativecommons.org\/licenses\/by\/4.0\/"}],"funder":[{"name":"the Shenzhen Stable Supporting Program","award":["WDZC20231124201906001"],"award-info":[{"award-number":["WDZC20231124201906001"]}]},{"name":"the Shenzhen Stable Supporting Program","award":["62275142"],"award-info":[{"award-number":["62275142"]}]},{"DOI":"10.13039\/501100001809","name":"the National Natural Science Foundation of China","doi-asserted-by":"publisher","award":["WDZC20231124201906001"],"award-info":[{"award-number":["WDZC20231124201906001"]}],"id":[{"id":"10.13039\/501100001809","id-type":"DOI","asserted-by":"publisher"}]},{"DOI":"10.13039\/501100001809","name":"the National Natural Science Foundation of China","doi-asserted-by":"publisher","award":["62275142"],"award-info":[{"award-number":["62275142"]}],"id":[{"id":"10.13039\/501100001809","id-type":"DOI","asserted-by":"publisher"}]}],"content-domain":{"domain":[],"crossmark-restriction":false},"short-container-title":["Sensors"],"abstract":"<jats:p>Large-size diffraction gratings have played an important role in modern scientific fields such as inertial confinement fusion, large-aperture astronomical telescopes, and high-precision immersion lithography machines with long-stroke displacement stages. However, due to the large size and high accuracy requirements of gratings, and considering the need for high efficiency and low cost, the fabrication of large gratings is extremely difficult. This paper reviews the fabrication technologies for large diffraction gratings, including grating tiling technology, grating ruling technology, single-exposure lithography, optical mosaic grating technology, and scanning beam interference lithography. It introduces the basic principles, representative research, and research progress of these technologies, analyzes their advantages and current problems, and provides reference for the development and optimization of the fabrication technologies of large diffraction gratings.<\/jats:p>","DOI":"10.3390\/s25071990","type":"journal-article","created":{"date-parts":[[2025,3,24]],"date-time":"2025-03-24T06:21:38Z","timestamp":1742797298000},"page":"1990","update-policy":"https:\/\/doi.org\/10.3390\/mdpi_crossmark_policy","source":"Crossref","is-referenced-by-count":21,"title":["Technologies for Fabricating Large-Size Diffraction Gratings"],"prefix":"10.3390","volume":"25","author":[{"given":"Changfeng","family":"Shao","sequence":"first","affiliation":[{"name":"Tsinghua Shenzhen International Graduate School, Tsinghua University, Shenzhen 518055, China"}],"role":[{"vocabulary":"crossref","role":"author"}]},{"given":"Xinghui","family":"Li","sequence":"additional","affiliation":[{"name":"Tsinghua Shenzhen International Graduate School, Tsinghua University, Shenzhen 518055, China"}],"role":[{"vocabulary":"crossref","role":"author"}]}],"member":"1968","published-online":{"date-parts":[[2025,3,22]]},"reference":[{"key":"ref_1","doi-asserted-by":"crossref","first-page":"2865","DOI":"10.1364\/JOSAA.18.002865","article-title":"Use of grating theories in integrated optics","volume":"18","author":"Silberstein","year":"2001","journal-title":"J. Opt. Soc. Am. A-Opt. Image Sci. Vis."},{"key":"ref_2","doi-asserted-by":"crossref","first-page":"1442","DOI":"10.1109\/50.618377","article-title":"Fiber grating sensors","volume":"15","author":"Kersey","year":"1997","journal-title":"J. Light. Technol."},{"key":"ref_3","doi-asserted-by":"crossref","first-page":"9","DOI":"10.1109\/TIM.2022.3213005","article-title":"A reflective-type heterodyne grating interferometer for three-degree-of-freedom subnanometer measurement","volume":"71","author":"Zhu","year":"2022","journal-title":"IEEE Trans. Instrum. Meas."},{"key":"ref_4","doi-asserted-by":"crossref","first-page":"134","DOI":"10.1038\/nmat2096","article-title":"Hard-X-ray dark-field imaging using a grating interferometer","volume":"7","author":"Pfeiffer","year":"2008","journal-title":"Nat. Mater."},{"key":"ref_5","doi-asserted-by":"crossref","first-page":"1009","DOI":"10.1364\/OL.450151","article-title":"Enhanced sensing performance from trapezoidal metallic gratings fabricated by laser interference lithography","volume":"47","author":"Chai","year":"2022","journal-title":"Opt. Lett."},{"key":"ref_6","unstructured":"Dekker, H., D\u2019Odorico, S., Kaufer, A., Delabre, B., and Kotzlowski, H. (April, January 27). Design, construction, and performance of UVES, the echelle spectrograph for the UT2 Kueyen Telescope at the ESO Paranal Observatory. Proceedings of the SPIE\u2014The International Society for Optical Engineering, Munich, Germany."},{"key":"ref_7","doi-asserted-by":"crossref","first-page":"L7","DOI":"10.1051\/0004-6361:20000058","article-title":"The reflection grating spectrometer on board XMM-Newton","volume":"365","author":"Brinkman","year":"2001","journal-title":"Astron. Astrophys."},{"key":"ref_8","doi-asserted-by":"crossref","first-page":"2377","DOI":"10.1080\/09500340008230520","article-title":"Holographic diffraction gratings for flat-field spectrometers","volume":"47","author":"Sokolova","year":"2000","journal-title":"J. Mod. Opt."},{"key":"ref_9","doi-asserted-by":"crossref","unstructured":"Ottevaere, H., Shcheglov, A., Nie, Y., and Thienpont, H. (2023, January 24\u201327). Miniaturized broadband spectrometers using concave blazed gratings. Proceedings of the 2023 28th Micro-Optics Conference, Miyazaki, Japan.","DOI":"10.23919\/MOC58607.2023.10302882"},{"key":"ref_10","first-page":"771","article-title":"A six-degree-of-freedom surface encoder for precision positioning of a planar motion stage","volume":"37","author":"Li","year":"2013","journal-title":"Precis. Eng.-J. Int. Soc. Precis. Eng. Nanotechnol."},{"key":"ref_11","doi-asserted-by":"crossref","unstructured":"Wang, S.T., Luo, L.B., Zhu, J.H., Shi, N.N., and Li, X.H. (2022). An ultra-precision absolute-type multi-degree-of-freedom grating encoder. Sensors, 22.","DOI":"10.3390\/s22239047"},{"key":"ref_12","doi-asserted-by":"crossref","unstructured":"Wang, S.T., Liao, B.Q., Shi, N.N., and Li, X.H. (2023). A compact and high-precision three-degree-of-freedom grating encoder based on a quadrangular frustum pyramid prism. Sensors, 23.","DOI":"10.3390\/s23084022"},{"key":"ref_13","doi-asserted-by":"crossref","first-page":"9358","DOI":"10.1364\/AO.429932","article-title":"Planar diffractive grating for magneto-optical trap application: Fabrication and testing","volume":"60","author":"Wang","year":"2021","journal-title":"Appl. Opt."},{"key":"ref_14","doi-asserted-by":"crossref","first-page":"2","DOI":"10.1007\/s41871-023-00221-6","article-title":"Design and parameter optimization of zero position code considering diffraction based on deep learning generative adversarial networks","volume":"7","author":"Wang","year":"2024","journal-title":"Nanomanuf. Metrol."},{"key":"ref_15","doi-asserted-by":"crossref","first-page":"57","DOI":"10.1109\/COMST.2016.2603518","article-title":"Optical communication in space: Challenges and mitigation techniques","volume":"19","author":"Kaushal","year":"2017","journal-title":"IEEE Commun. Surv. Tutor."},{"key":"ref_16","doi-asserted-by":"crossref","first-page":"1178","DOI":"10.1109\/JQE.2002.802025","article-title":"Optical communication with synchronized hyperchaos generated electrooptically","volume":"38","author":"Goedgebuer","year":"2002","journal-title":"IEEE J. Quantum Electron."},{"key":"ref_17","doi-asserted-by":"crossref","unstructured":"Ran, J.Q., Chen, Y.R., Wang, G.H., Zhong, Z.L., Zhang, J.L., Xu, O., Huang, Q.D., and Lei, X.Q. (2024). Mechanically induced long-period fiber gratings and applications. Photonics, 11.","DOI":"10.3390\/photonics11030223"},{"key":"ref_18","doi-asserted-by":"crossref","first-page":"11","DOI":"10.1038\/s41377-024-01506-1","article-title":"Anisotropy-free arrayed waveguide gratings on X-cut thin film lithium niobate platform of in-plane anisotropy","volume":"13","author":"Yi","year":"2024","journal-title":"Light-Sci. Appl."},{"key":"ref_19","doi-asserted-by":"crossref","unstructured":"Han, Y., Zang, Z., Wu, L., Hao, Y., Zhu, Q., Liu, X., Chang-Hasnain, C., and Fu, H.Y. (2023, January 7\u201312). Wide-field multipass spectral-scanning 3D imaging LiDAR using an echelle grating. Proceedings of the 2023 Conference on Lasers and Electro-Optics (CLEO), San Jose, CA, USA.","DOI":"10.1364\/CLEO_AT.2023.ATu4I.1"},{"key":"ref_20","first-page":"042003","article-title":"An insight into optical metrology in manufacturing","volume":"32","author":"Shimizu","year":"2021","journal-title":"Meas. Sci. Technol."},{"key":"ref_21","doi-asserted-by":"crossref","unstructured":"Sorgato, S., Smeesters, L., Vervaeke, M., Rochlitz, K., Rosseel, D., Verbaenen, J., Verlinski, S., Thienpont, H., and Van Erps, J. (2024, January 8\u201312). Custom freeform optics for LiDAR applications: From design to fabrication. Proceedings of the Conference on Optical Design and Engineering IX, Strasbourg, France.","DOI":"10.1117\/12.3017565"},{"key":"ref_22","doi-asserted-by":"crossref","first-page":"1626","DOI":"10.1063\/1.870664","article-title":"Ignition and high-gain with ultrapowerful lasers","volume":"1","author":"Tabak","year":"1994","journal-title":"Phys. Plasmas"},{"key":"ref_23","doi-asserted-by":"crossref","first-page":"3933","DOI":"10.1063\/1.871025","article-title":"Development of the indirect-drive approach to inertial confinement fusion and the target physics basis for ignition and gain","volume":"2","author":"Lindl","year":"1995","journal-title":"Phys. Plasmas"},{"key":"ref_24","doi-asserted-by":"crossref","first-page":"339","DOI":"10.1063\/1.1578638","article-title":"The physics basis for ignition using indirect-drive targets on the National Ignition Facility","volume":"11","author":"Lindl","year":"2004","journal-title":"Phys. Plasmas"},{"key":"ref_25","doi-asserted-by":"crossref","first-page":"13","DOI":"10.1103\/PhysRevE.110.015209","article-title":"Plasma-grating-based laser pulse compressor","volume":"110","author":"Lehmann","year":"2024","journal-title":"Phys. Rev. E"},{"key":"ref_26","doi-asserted-by":"crossref","first-page":"94","DOI":"10.1364\/OL.35.000094","article-title":"Femtosecond fiber CPA system emitting 830 W average output power","volume":"35","author":"Eidam","year":"2010","journal-title":"Opt. Lett."},{"key":"ref_27","doi-asserted-by":"crossref","first-page":"1583","DOI":"10.1364\/OL.519542","article-title":"Demonstration of a 1 TW peak power, joule-level ultrashort Tm:YLF laser","volume":"49","author":"Tamer","year":"2024","journal-title":"Opt. Lett."},{"key":"ref_28","doi-asserted-by":"crossref","first-page":"110502","DOI":"10.3788\/COL202018.110502","article-title":"Chirped pulse amplification: Review and prospective from diffractive optics Invited","volume":"18","author":"Zhou","year":"2020","journal-title":"Chin. Opt. Lett."},{"key":"ref_29","doi-asserted-by":"crossref","first-page":"453","DOI":"10.13182\/FST06-A1161","article-title":"Laser challenges for fast ignition","volume":"49","author":"Zuegel","year":"2006","journal-title":"Fusion Sci. Technol."},{"key":"ref_30","doi-asserted-by":"crossref","unstructured":"Xu, B., Jia, Z., Li, X., Chen, Y.-L., Shimizu, Y., Ito, S., and Gao, W. (2013, January 9\u201311). Surface form metrology of micro-optics. Proceedings of the International Conference on Optics in Precision Engineering and Nanotechnology (icOPEN2013), Singapore.","DOI":"10.1117\/12.2019243"},{"key":"ref_31","doi-asserted-by":"crossref","unstructured":"Li, X.X., Zhou, B., Xu, M.Q., Chen, Y.D., Wang, Y.H., Wang, J., and Zhou, C.H. (2022, January 5\u201311). Detection and evaluation of surface defects for large-size grating. Proceedings of the Conference on Holography, Diffractive Optics, and Applications XII Part of SPIE\/COS Photonics Asia Conference, Electr Network.","DOI":"10.1117\/12.2642142"},{"key":"ref_32","doi-asserted-by":"crossref","first-page":"105675","DOI":"10.1016\/j.optlastec.2019.105675","article-title":"Effect of thickness non-uniformity of large-area grating metal film on grating diffraction wavefront","volume":"119","author":"Mi","year":"2019","journal-title":"Opt. Laser Technol."},{"key":"ref_33","doi-asserted-by":"crossref","unstructured":"Burgh, E.B., Nokdsieck, K.H., Kobulnicky, H.A., Williams, T.B., O\u2019Donoghue, D., Smith, M.P., and Percival, J.W. (2002, January 25\u201328). The prime focus imaging spectrograph for the Southern African large telescope: Optical design. Proceedings of the Conference on Instrument Design and Performance for Optical\/Infrared Ground-based Telescopes, Waikoloa, HI, USA.","DOI":"10.1117\/12.460312"},{"key":"ref_34","doi-asserted-by":"crossref","first-page":"373","DOI":"10.1051\/aas:1996251","article-title":"ELODIE: A spectrograph for accurate radial velocity measurements","volume":"119","author":"Baranne","year":"1996","journal-title":"Astron. Astrophys. Suppl. Ser."},{"key":"ref_35","doi-asserted-by":"crossref","first-page":"251","DOI":"10.1086\/386343","article-title":"The Indo-US library of coude feed stellar spectra","volume":"152","author":"Valdes","year":"2004","journal-title":"Astrophys. J. Suppl. Ser."},{"key":"ref_36","doi-asserted-by":"crossref","unstructured":"de Jong, F., van der Pasch, B., Castenmiller, T., Vleeming, B., Droste, R., and van de Mast, F. (2009, January 22\u201327). Enabling the lithography roadmap: An immersion tool based on a novel stage positioning system. Proceedings of the SPIE Advanced Lithography, San Jose, CA, USA.","DOI":"10.1117\/12.814254"},{"key":"ref_37","doi-asserted-by":"crossref","first-page":"1993","DOI":"10.1109\/TIE.2018.2838110","article-title":"Convergence rate oriented iterative feedback tuning with application to an ultraprecision wafer stage","volume":"66","author":"Li","year":"2019","journal-title":"IEEE Trans. Ind. Electron."},{"key":"ref_38","doi-asserted-by":"crossref","first-page":"21113","DOI":"10.1364\/OE.427307","article-title":"Two-channel six degrees of freedom grating-encoder for precision-positioning of sub-components in synthetic-aperture optics","volume":"29","author":"Yu","year":"2021","journal-title":"Opt. Express"},{"key":"ref_39","doi-asserted-by":"crossref","first-page":"5258","DOI":"10.1364\/OL.44.005258","article-title":"Highly accurate, absolute optical encoder using a hybrid-positioning method","volume":"44","author":"Shi","year":"2019","journal-title":"Opt. Lett."},{"key":"ref_40","unstructured":"(2024, December 21). Incremental Exposed Two-Coordinate Encoder. Available online: https:\/\/www.heidenhain.com\/products\/linear-encoders\/exposed\/pp-281."},{"key":"ref_41","doi-asserted-by":"crossref","unstructured":"Ye, W., Zhang, M., Zhu, Y., Wang, L., Hu, J., Li, X., and Hu, C. (2019). Ultraprecision real-time displacements calculation algorithm for the grating interferometer system. Sensors, 19.","DOI":"10.3390\/s19102409"},{"key":"ref_42","doi-asserted-by":"crossref","first-page":"107167","DOI":"10.1016\/j.optlaseng.2022.107167","article-title":"High-precision 2D grating displacement measurement system based on double-spatial heterodyne optical path interleaving","volume":"158","author":"Yin","year":"2022","journal-title":"Opt. Lasers Eng."},{"key":"ref_43","doi-asserted-by":"crossref","unstructured":"Zhou, W., Sun, Y., Liu, Z., Wang, W., Liu, L., and Li, W. (2025). A random angle error interference eliminating method for grating interferometry measurement based on symmetry littrow structure. Laser Photonics Rev., 2401659.","DOI":"10.1002\/lpor.202401659"},{"key":"ref_44","doi-asserted-by":"crossref","first-page":"41671","DOI":"10.1364\/OE.475830","article-title":"Littrow 3D measurement based on 2D grating dual-channel equal-optical path interference","volume":"30","author":"Yin","year":"2022","journal-title":"Opt. Express"},{"key":"ref_45","doi-asserted-by":"crossref","first-page":"111935","DOI":"10.1016\/j.sna.2020.111935","article-title":"Design and testing of a linear encoder capable of measuring absolute distance","volume":"308","author":"Shi","year":"2020","journal-title":"Sens. Actuators A Phys."},{"key":"ref_46","doi-asserted-by":"crossref","first-page":"111","DOI":"10.1007\/s41871-019-00039-1","article-title":"Reduction in cross-talk errors in a six-degree-of-freedom surface encoder","volume":"2","author":"Matsukuma","year":"2019","journal-title":"Nanomanuf. Metrol."},{"key":"ref_47","doi-asserted-by":"crossref","unstructured":"Huang, G., Cui, C., Lei, X., Li, Q., Yan, S., Li, X., and Wang, G. (2025). A Review of Optical Interferometry for High-Precision Length Measurement. Micromachines, 16.","DOI":"10.3390\/mi16010006"},{"key":"ref_48","doi-asserted-by":"crossref","unstructured":"Castenmiller, T., van de Mast, F., de Kort, T., van de Vin, C., de Wit, M., Stegen, R., and van Cleef, S. (2010, January 21\u201325). Towards ultimate optical lithography with NXT:1950i dual stage immersion platform. Proceedings of the SPIE Advanced Lithography, San Jose, CA, USA.","DOI":"10.1117\/12.847025"},{"key":"ref_49","first-page":"17","article-title":"Ultraprecision grating positioning technology for wafer stage of lithography machine","volume":"59","author":"Zhu","year":"2022","journal-title":"Laser Optoelectron. Prog."},{"key":"ref_50","doi-asserted-by":"crossref","first-page":"116799","DOI":"10.1016\/j.measurement.2025.116799","article-title":"Design and demonstration of a large range precision grating sensor for simultaneous measurement of out-of-plane motions","volume":"249","author":"Luo","year":"2025","journal-title":"Measurement"},{"key":"ref_51","doi-asserted-by":"crossref","first-page":"17","DOI":"10.1117\/1.OE.60.4.045102","article-title":"Influence of installation error of grating interferometer on high-precision displacement measurement","volume":"60","author":"Du","year":"2021","journal-title":"Opt. Eng."},{"key":"ref_52","doi-asserted-by":"crossref","first-page":"21378","DOI":"10.1364\/OE.24.021378","article-title":"Two-probe optical encoder for absolute positioning of precision stages by using an improved scale grating","volume":"24","author":"Li","year":"2016","journal-title":"Opt. Express"},{"key":"ref_53","first-page":"9","article-title":"A wavelength-stabilized and quasi-common-path heterodyne grating interferometer with sub-nanometer precision","volume":"73","author":"Wang","year":"2024","journal-title":"IEEE Trans. Instrum. Meas."},{"key":"ref_54","doi-asserted-by":"crossref","first-page":"110751","DOI":"10.1016\/j.optlastec.2024.110751","article-title":"Bidirectional Littrow double grating interferometry for quadruple optical interpolation","volume":"175","author":"Zhou","year":"2024","journal-title":"Opt. Laser Technol."},{"key":"ref_55","doi-asserted-by":"crossref","first-page":"983","DOI":"10.1016\/j.fusengdes.2009.11.006","article-title":"Advances in inertial confinement fusion at the National Ignition Facility (NIF)","volume":"85","author":"Moses","year":"2010","journal-title":"Fusion Eng. Des."},{"key":"ref_56","doi-asserted-by":"crossref","unstructured":"Fathi, H., Naerhi, M., and Gumenyuk, R. (2021). Towards ultimate high-power scaling: Coherent beam combining of fiber lasers. Photonics, 8.","DOI":"10.20944\/preprints202111.0351.v1"},{"key":"ref_57","doi-asserted-by":"crossref","unstructured":"Zhu, J.C., Zhao, Z.C., Liu, Q., Chen, X.H., Li, H., Tang, S.F., and Shen, W.M. (2023). Geostationary full-spectrum wide-swath high-fidelity imaging spectrometer: Optical design and prototype development. Remote Sens., 15.","DOI":"10.3390\/rs15020396"},{"key":"ref_58","doi-asserted-by":"crossref","unstructured":"Zhang, Y.N., Li, W.Z., Duan, W.H., Huang, Z.H., and Yang, H.D. (2022). Echelle grating spectroscopic technology for high-resolution and broadband spectral measurement. Appl. Sci., 12.","DOI":"10.3390\/app122111042"},{"key":"ref_59","doi-asserted-by":"crossref","first-page":"10","DOI":"10.1177\/1687814015575987","article-title":"Disturbance estimation and compensation for planar motors on the long-stroke stage of a wafer stage","volume":"7","author":"Xia","year":"2015","journal-title":"Adv. Mech. Eng."},{"key":"ref_60","doi-asserted-by":"crossref","first-page":"773","DOI":"10.1016\/j.cirp.2015.05.009","article-title":"Measurement technologies for precision positioning","volume":"64","author":"Gao","year":"2015","journal-title":"CIRP Ann.-Manuf. Technol."},{"key":"ref_61","doi-asserted-by":"crossref","first-page":"1819","DOI":"10.1364\/AO.54.001819","article-title":"300 mm ruling engine producing gratings and echelles under interferometric control in China","volume":"54","author":"Li","year":"2015","journal-title":"Appl. Opt."},{"key":"ref_62","first-page":"603","article-title":"Obtaining diffraction optical elements with a discretely variable period of the rulings on a computer-controlled ruling engine","volume":"64","author":"Abdrakhmanov","year":"1997","journal-title":"J. Opt. Technol."},{"key":"ref_63","doi-asserted-by":"crossref","first-page":"2791","DOI":"10.1364\/AO.516926","article-title":"Fabrication of a high-quality, small blaze angle grating for visible short-wave infrared hyperspectral cameras","volume":"63","author":"Ti","year":"2024","journal-title":"Appl. Opt."},{"key":"ref_64","doi-asserted-by":"crossref","first-page":"60","DOI":"10.1038\/s41378-024-00687-4","article-title":"Azimuthal rotation-controlled nanoinscribing for continuous patterning of period- and shape-tunable asymmetric nanogratings","volume":"10","author":"Lee","year":"2024","journal-title":"Microsyst. Nanoeng."},{"key":"ref_65","doi-asserted-by":"crossref","unstructured":"Wilson, D.W., Maker, P.D., Muller, R.E., Mouroulis, P., and Backlund, J. (2003, January 3\u20134). Recent advances in blazed grating fabrication by electron-beam lithography. Proceedings of the Conference on Current Developments in Lens Design and Optical Engineering IV, San Diego, CA, USA.","DOI":"10.1117\/12.510204"},{"key":"ref_66","doi-asserted-by":"crossref","first-page":"590","DOI":"10.1049\/el:19870424","article-title":"Fabrication of first-order gratings for 1.5 \u03bcm DFB lasers by high-voltage electron-beam lithography","volume":"23","author":"Fice","year":"1987","journal-title":"Electron. Lett."},{"key":"ref_67","doi-asserted-by":"crossref","first-page":"103","DOI":"10.1364\/AO.33.000103","article-title":"Proximity-compensated blazed transmission grating manufacture with direct-writing, electron-beam lithography","volume":"33","author":"Ekberg","year":"1994","journal-title":"Appl. Opt."},{"key":"ref_68","doi-asserted-by":"crossref","first-page":"0905001","DOI":"10.3788\/AOS201939.0905001","article-title":"Two-Dimensional Grating Fabrication Based on Ultra-Precision Laser Direct Writing System","volume":"39","author":"Li","year":"2019","journal-title":"Acta Opt. Sin."},{"key":"ref_69","unstructured":"Feldman, M. (2014). Optical projection lithography. Nanolithography: The Art of Fabricating Nanoelectronic and Nanophotonic Devices and Systems, Woodhead Publishing Ltd."},{"key":"ref_70","doi-asserted-by":"crossref","first-page":"708","DOI":"10.1364\/AO.49.000708","article-title":"Extended dual-grating alignment method for optical projection lithography","volume":"49","author":"Chen","year":"2010","journal-title":"Appl. Opt."},{"key":"ref_71","first-page":"221","article-title":"Recent trends in optical lithography","volume":"14","author":"Rothschild","year":"2003","journal-title":"Linc. Lab. J."},{"key":"ref_72","doi-asserted-by":"crossref","first-page":"64","DOI":"10.1038\/s41378-021-00286-7","article-title":"UV-LED projection photolithography for high-resolution functional photonic components","volume":"7","author":"Zheng","year":"2021","journal-title":"Microsyst. Nanoeng."},{"key":"ref_73","doi-asserted-by":"crossref","first-page":"1874","DOI":"10.1088\/0957-4484\/16\/9\/076","article-title":"Fabrication of a 50 nm half-pitch wire grid polarizer using nanoimprint lithography","volume":"16","author":"Ahn","year":"2005","journal-title":"Nanotechnology"},{"key":"ref_74","doi-asserted-by":"crossref","first-page":"2304","DOI":"10.1021\/nn9003633","article-title":"Large-area roll-to-roll and roll-to-plate nanoimprint lithography: A step toward high-throughput application of continuous nanoimprinting","volume":"3","author":"Ahn","year":"2009","journal-title":"ACS Nano"},{"key":"ref_75","doi-asserted-by":"crossref","first-page":"5299","DOI":"10.1063\/1.1766071","article-title":"Fabrication of 5 nm linewidth and 14 nm pitch features by nanoimprint lithography","volume":"84","author":"Austin","year":"2004","journal-title":"Appl. Phys. Lett."},{"key":"ref_76","doi-asserted-by":"crossref","first-page":"31","DOI":"10.1038\/s41378-021-00256-z","article-title":"Polarized holographic lithography system for high-uniformity microscale patterning with periodic tunability","volume":"7","author":"Xue","year":"2021","journal-title":"Microsyst. Nanoeng."},{"key":"ref_77","first-page":"8","article-title":"Fabrication of a concave grating with a large line spacing via a novel dual-beam interference lithography method","volume":"24","author":"Li","year":"2016","journal-title":"Opt. Express"},{"key":"ref_78","doi-asserted-by":"crossref","unstructured":"Zhu, X., Li, X., Zhou, Q., Wang, X., and Ni, K. (2016, January 12\u201314). A blu-ray laser diode based dual-beam interference lithography for fabrication of diffraction gratings for surface encoders. Proceedings of the SPIE\/COS Photonics Asia, Beijing, China.","DOI":"10.1117\/12.2245710"},{"key":"ref_79","doi-asserted-by":"crossref","unstructured":"Luo, L.B., Shan, S.N., and Li, X.H. (2024). A review: Laser interference lithography for diffraction gratings and their applications in encoders and spectrometers. Sensors, 24.","DOI":"10.3390\/s24206617"},{"key":"ref_80","doi-asserted-by":"crossref","first-page":"2179","DOI":"10.1364\/OE.382178","article-title":"Patterning nanoscale crossed grating with high uniformity by using two-axis Lloyd\u2019s mirrors based interference lithography","volume":"28","author":"Xue","year":"2020","journal-title":"Opt. Express"},{"key":"ref_81","first-page":"388","article-title":"Development of a parameterized mechanical model of a chisel-edge grating ruling tool","volume":"50","author":"Jirigalantu","year":"2017","journal-title":"Precis. Eng.-J. Int. Soc. Precis. Eng. Nanotechnol."},{"key":"ref_82","doi-asserted-by":"crossref","first-page":"23","DOI":"10.1016\/j.mee.2014.11.015","article-title":"High resolution optical lithography or high throughput electron beam lithography: The technical struggle from the micro to the nano-fabrication evolution","volume":"133","author":"Okazaki","year":"2015","journal-title":"Microelectron. Eng."},{"key":"ref_83","doi-asserted-by":"crossref","unstructured":"Zhan, Y.J., Deng, L.G., Dai, W., Qiu, Y.X., Sun, S.C., Sun, D.Z., Hu, B.W., and Guan, J.G. (2024). Fabrication of large-area nanostructures using cross-nanoimprint strategy. Nanomaterials, 14.","DOI":"10.3390\/nano14120998"},{"key":"ref_84","doi-asserted-by":"crossref","first-page":"18","DOI":"10.1016\/S1369-7021(05)00698-X","article-title":"Projection optical lithography","volume":"8","author":"Rothschild","year":"2005","journal-title":"Mater. Today"},{"key":"ref_85","doi-asserted-by":"crossref","first-page":"3","DOI":"10.1007\/s41871-020-00083-2","article-title":"Laser Interference Lithography for Fabrication of Planar Scale Gratings for Optical Metrology","volume":"4","author":"Shimizu","year":"2021","journal-title":"Nanomanuf. Metrol."},{"key":"ref_86","doi-asserted-by":"crossref","first-page":"81","DOI":"10.1080\/00033790.2021.1991000","article-title":"The ruling engines and diffraction gratings of Henry Augustus Rowland","volume":"79","author":"Brown","year":"2022","journal-title":"Ann. Sci."},{"key":"ref_87","doi-asserted-by":"crossref","first-page":"747","DOI":"10.1080\/713818246","article-title":"Some observations on scattered light and Lyman ghosts given by diffraction gratings","volume":"17","author":"Verrill","year":"1970","journal-title":"Opt. Acta"},{"key":"ref_88","doi-asserted-by":"crossref","first-page":"608001","DOI":"10.3788\/CJL201441.0608001","article-title":"300 mm-travel stage of grating ruling engine and its self-adaptive control method","volume":"41","author":"Li","year":"2014","journal-title":"Chin. J. Lasers"},{"key":"ref_89","doi-asserted-by":"crossref","first-page":"111","DOI":"10.1016\/S0169-4332(00)00352-4","article-title":"Electron beam lithography: Resolution limits and applications","volume":"164","author":"Vieu","year":"2000","journal-title":"Appl. Surf. Sci."},{"key":"ref_90","doi-asserted-by":"crossref","first-page":"4","DOI":"10.1007\/s41871-023-00184-8","article-title":"Formation of Laser-Induced Periodic Surface Structures on Reaction-Bonded Silicon Carbide by Femtosecond Pulsed Laser Irradiation","volume":"6","author":"Meshram","year":"2023","journal-title":"Nanomanuf. Metrol."},{"key":"ref_91","doi-asserted-by":"crossref","unstructured":"Li, X.H., Zhu, X.W., Zhou, Q., Wang, H.H., and Ni, K. (2015, January 17\u201319). Low-cost lithography for fabrication of one-dimensional diffraction gratings by using laser diodes. Proceedings of the International Conference on Optical Instruments and Technology\u2014Micro\/Nano Photonics and Fabrication, Beijing, China.","DOI":"10.1117\/12.2193344"},{"key":"ref_92","doi-asserted-by":"crossref","unstructured":"Braat, J.J.M. (1999, January 21\u201323). Extreme UV lithography: A candidate for next-generation lithography. Proceedings of the SPIE\u2014The International Society for Optical Engineering, Prague, Czech Republic.","DOI":"10.1117\/12.373596"},{"key":"ref_93","doi-asserted-by":"crossref","unstructured":"Jugessur, A.S., Zhang, A., and Lyu, Y. (2016, January 14\u201317). Nanoimprint of large-area optical gratings on conventional photoresist using a telflon-coated nanoimprint mold. Proceedings of the Conference on Advanced Fabrication Technologies for Micro\/Nano Optics and Photonics IX, San Francisco, CA, USA.","DOI":"10.1117\/12.2211162"},{"key":"ref_94","doi-asserted-by":"crossref","first-page":"495","DOI":"10.1002\/adma.200600882","article-title":"Nanoimprint lithography: Methods and material requirements","volume":"19","author":"Guo","year":"2007","journal-title":"Adv. Mater."},{"key":"ref_95","doi-asserted-by":"crossref","first-page":"062004","DOI":"10.1088\/2631-7990\/ad6838","article-title":"Nanofabrication of nanostructure lattices: From high-quality large patterns to precise hybrid units","volume":"6","author":"Rui","year":"2024","journal-title":"Int. J. Extrem. Manuf."},{"key":"ref_96","doi-asserted-by":"crossref","first-page":"461","DOI":"10.1016\/j.cirp.2014.02.001","article-title":"A two-axis Lloyd\u2019s mirror interferometer for fabrication of two-dimensional diffraction gratings","volume":"63","author":"Li","year":"2014","journal-title":"CIRP Ann.-Manuf. Technol."},{"key":"ref_97","doi-asserted-by":"crossref","first-page":"1979","DOI":"10.1007\/s12541-013-0269-6","article-title":"Fabrication of scale gratings for surface encoders by using laser interference lithography with 405 nm laser diodes","volume":"14","author":"Li","year":"2013","journal-title":"Int. J. Precis. Eng. Manuf."},{"key":"ref_98","doi-asserted-by":"crossref","first-page":"16028","DOI":"10.1364\/OE.25.016028","article-title":"Holographic fabrication of an arrayed one-axis scale grating for a two-probe optical linear encoder","volume":"25","author":"Li","year":"2017","journal-title":"Opt. Express"},{"key":"ref_99","doi-asserted-by":"crossref","first-page":"107627","DOI":"10.1016\/j.optlaseng.2023.107627","article-title":"Development of dielectric-film-based polarization modulation scheme for patterning highly uniform 2D array structures with periodic tunability","volume":"167","author":"Xue","year":"2023","journal-title":"Opt. Lasers Eng."},{"key":"ref_100","doi-asserted-by":"crossref","unstructured":"Li, X.H., Lu, H.O., Zhou, Q., Wu, G.H., Ni, K., and Wang, X.H. (2018). An orthogonal type two-axis Lloyd\u2019s mirror for holographic fabrication of two-dimensional planar scale gratings with large area. Appl. Sci., 8.","DOI":"10.3390\/app8112283"},{"key":"ref_101","unstructured":"Brealey, G.A., Fletcher, J.M., Grundmann, W.A., and Richardson, E.H. (August, January 29). Adjustable mosaic grating mounts. Proceedings of the Optics & Photonics, San Diego, CA, USA."},{"key":"ref_102","doi-asserted-by":"crossref","first-page":"1749","DOI":"10.1364\/OL.32.001749","article-title":"Tiled-grating compression of multiterawatt laser pulses","volume":"32","author":"Cotel","year":"2007","journal-title":"Opt. Lett."},{"key":"ref_103","doi-asserted-by":"crossref","unstructured":"Zhai, Q.H., Xue, G.P., Lin, L.Y., Zhou, Q., Ni, K., Wang, X.H., and Li, X.H. (2021, January 10\u201312). A mechanical mosaic method for reflective grating base on diffracted beams orientation. Proceedings of the Conference on Holography, Diffractive Optics, and Applications XI, Nantong, China.","DOI":"10.1117\/12.2602229"},{"key":"ref_104","doi-asserted-by":"crossref","first-page":"349","DOI":"10.5194\/ms-8-349-2017","article-title":"A novel 5-DOF high-precision compliant parallel mechanism for large-aperture grating tiling","volume":"8","author":"Shao","year":"2017","journal-title":"Mech. Sci."},{"key":"ref_105","doi-asserted-by":"crossref","first-page":"367","DOI":"10.1016\/S0030-4018(97)00356-8","article-title":"An array-grating compressor for high-power chirped-pulse amplification lasers","volume":"145","author":"Zhang","year":"1998","journal-title":"Opt. Commun."},{"key":"ref_106","first-page":"503","article-title":"Manufacturing large-size grating by mosaic way","volume":"8","author":"Zhao","year":"2000","journal-title":"Opt. Precis. Eng."},{"key":"ref_107","doi-asserted-by":"crossref","first-page":"1362","DOI":"10.1143\/JJAP.43.1362","article-title":"Far-field pattern analysis for an array grating compressor","volume":"43","author":"Harimoto","year":"2004","journal-title":"Jpn. J. Appl. Phys."},{"key":"ref_108","doi-asserted-by":"crossref","first-page":"635","DOI":"10.1364\/OL.29.000635","article-title":"Demonstration of coherent addition of multiple gratings for high-energy chirped-pulse-amplified lasers","volume":"29","author":"Kessler","year":"2004","journal-title":"Opt. Lett."},{"key":"ref_109","doi-asserted-by":"crossref","first-page":"33386","DOI":"10.1364\/OE.23.033386","article-title":"Stable and near Fourier- transform-limit 30fs pulse compression with a tiled grating compressor scheme","volume":"23","author":"Li","year":"2015","journal-title":"Opt. Express"},{"key":"ref_110","doi-asserted-by":"crossref","first-page":"9562","DOI":"10.1364\/OE.15.009562","article-title":"Large-aperture grating tiling by interferometry for petawatt chirped-pulse-amplification systems","volume":"15","author":"Qiao","year":"2007","journal-title":"Opt. Express"},{"key":"ref_111","unstructured":"Ezaki, Y., Tabata, M., Kihara, M., Horiuchi, Y., Endo, M., and Jitsuno, T. (2007, January 9\u201314). Development of a segmented grating mount system for FIREX-1. Proceedings of the 5th International Conference on Inertial Fusion Sciences and Applications (IFSA 2007), Kobe, Japan."},{"key":"ref_112","doi-asserted-by":"crossref","unstructured":"Neauport, J., and Bonod, N. (2008, January 22\u201324). Pulse compression gratings for the PETAL project\u2014A review of various technologies. Proceedings of the SPIE\u2014The International Society for Optical Engineering, Boulder, CO, USA.","DOI":"10.1117\/12.804413"},{"key":"ref_113","doi-asserted-by":"crossref","first-page":"10088","DOI":"10.1364\/OE.18.010088","article-title":"Experimental demonstration of a synthetic aperture compression scheme for multi-Petawatt high-energy lasers","volume":"18","author":"Blanchot","year":"2010","journal-title":"Opt. Express"},{"key":"ref_114","doi-asserted-by":"crossref","first-page":"7432","DOI":"10.1364\/AO.46.007432","article-title":"Alignment of a tiled-grating compressor in a high-power chirped-pulse amplification laser system","volume":"46","author":"Hornung","year":"2007","journal-title":"Appl. Opt."},{"key":"ref_115","doi-asserted-by":"crossref","first-page":"190","DOI":"10.1016\/j.optlastec.2017.12.009","article-title":"Theoretical and experimental research of tiling error compensation method based on a small-size mirror for large-aperture tiled-grating compressors","volume":"104","author":"Zhang","year":"2018","journal-title":"Opt. Laser Technol."},{"key":"ref_116","doi-asserted-by":"crossref","first-page":"0216001","DOI":"10.3788\/CJL201239.0216001","article-title":"Design and demonstration of high stability array tiled grating frame","volume":"39","author":"Zhang","year":"2012","journal-title":"Chin. J. Lasers"},{"key":"ref_117","first-page":"5","article-title":"Design and demonstration of a tiled-grating frame","volume":"51","author":"Zhang","year":"2012","journal-title":"Opt. Eng."},{"key":"ref_118","doi-asserted-by":"crossref","first-page":"1741","DOI":"10.3788\/HPLPB20112307.1741","article-title":"Structure design of high accuracy 2*2 array grating","volume":"23","author":"Zhou","year":"2011","journal-title":"High Power Laser Part. Beams"},{"key":"ref_119","doi-asserted-by":"crossref","first-page":"718","DOI":"10.1364\/AO.52.000718","article-title":"Research on potential problems of object image grating self-tiling for applications in large aperture optical systems","volume":"52","author":"Li","year":"2013","journal-title":"Appl. Opt."},{"key":"ref_120","unstructured":"(2024, December 21). Demonstration of Real-Time, Phase-Locked Alignment of Tiled Gratings for Chirped-Pulse Amplified Lasers. Available online: https:\/\/www.lle.rochester.edu\/media\/publications\/lle_review\/documents\/v100\/100_02Demo.pdf."},{"key":"ref_121","doi-asserted-by":"crossref","first-page":"1783","DOI":"10.1364\/OL.35.001783","article-title":"Pulse compression and beam focusing with segmented diffraction gratings in a high-power chirped-pulse amplification glass laser system","volume":"35","author":"Habara","year":"2010","journal-title":"Opt. Lett."},{"key":"ref_122","doi-asserted-by":"crossref","first-page":"032017","DOI":"10.1088\/1742-6596\/112\/3\/032017","article-title":"Pulse compression using segmented grating in Gekko MII system, ILE","volume":"112","author":"Habara","year":"2008","journal-title":"J. Phys. Conf. Ser."},{"key":"ref_123","first-page":"6","article-title":"Demonstration of state-locked control of tiled system","volume":"50","author":"Yang","year":"2011","journal-title":"Opt. Eng."},{"key":"ref_124","doi-asserted-by":"crossref","first-page":"262","DOI":"10.1016\/j.optlaseng.2011.08.004","article-title":"Automatic phase-locked control of grating tiling","volume":"50","author":"Yang","year":"2012","journal-title":"Opt. Lasers Eng."},{"key":"ref_125","doi-asserted-by":"crossref","first-page":"1148","DOI":"10.1364\/JOSA.50.001148","article-title":"The Johns Hopkins University and diffraction gratings","volume":"50","author":"Strong","year":"1960","journal-title":"J. Opt. Soc. Am."},{"key":"ref_126","first-page":"643","article-title":"Optical-electronic tracking system for controlling the fabrication of diffraction gratings","volume":"28","author":"Gerasimov","year":"1970","journal-title":"Opt. Spectrosc."},{"key":"ref_127","doi-asserted-by":"crossref","first-page":"1861","DOI":"10.1364\/AO.6.001861","article-title":"Use of diffraction gratings for controlling a ruling engine","volume":"6","author":"Gerasimov","year":"1967","journal-title":"Appl. Opt."},{"key":"ref_128","doi-asserted-by":"crossref","first-page":"495","DOI":"10.1364\/JOSA.41.000495","article-title":"Interferometric calibration of precision screws and control of ruling engines","volume":"41","author":"Harrison","year":"1951","journal-title":"J. Opt. Soc. Am."},{"key":"ref_129","doi-asserted-by":"crossref","first-page":"112","DOI":"10.1364\/JOSA.45.000112","article-title":"Interferometric control of grating ruling with continuous carriage advance","volume":"45","author":"Harrison","year":"1955","journal-title":"J. Opt. Soc. Am."},{"key":"ref_130","doi-asserted-by":"crossref","first-page":"591","DOI":"10.1364\/JOSA.60.000591","article-title":"Large diffraction gratings ruled on a commercial measuring machine controlled interferometrically","volume":"60","author":"Harrison","year":"1970","journal-title":"J. Opt. Soc. Am."},{"key":"ref_131","doi-asserted-by":"crossref","first-page":"751","DOI":"10.1364\/JOSA.62.000751","article-title":"750-mm ruling engine producing large gratings and echelles","volume":"62","author":"Harrison","year":"1972","journal-title":"J. Opt. Soc. Am."},{"key":"ref_132","doi-asserted-by":"crossref","first-page":"19448","DOI":"10.1364\/OE.27.019448","article-title":"Ruling engine using adjustable diamond and interferometric control for high-quality gratings and large echelles","volume":"27","author":"Mi","year":"2019","journal-title":"Opt. Express"},{"key":"ref_133","doi-asserted-by":"crossref","first-page":"1399","DOI":"10.1364\/AO.31.001399","article-title":"Ruling engine using a piezoelectric device for large and high-groove density gratings","volume":"31","author":"Kita","year":"1992","journal-title":"Appl. Opt."},{"key":"ref_134","doi-asserted-by":"crossref","first-page":"745","DOI":"10.3788\/OPE.20152303.0745","article-title":"Analysis and improvement of rod structures for large diffraction grating ruling engines","volume":"23","author":"Mi","year":"2015","journal-title":"Opt. Precis. Eng."},{"key":"ref_135","unstructured":"(2024, December 21). The Large-Scale High-Precision Diffraction Grating Ruling System. (In Chinese)."},{"key":"ref_136","doi-asserted-by":"crossref","first-page":"5857","DOI":"10.1364\/AO.56.005857","article-title":"Correcting groove error in gratings ruled on a 500-mm ruling engine using interferometric control","volume":"56","author":"Mi","year":"2017","journal-title":"Appl. Opt."},{"key":"ref_137","doi-asserted-by":"crossref","first-page":"4084","DOI":"10.1364\/AO.54.004084","article-title":"Practical method study on correcting yaw error of 500 mm grating blank carriage in real time","volume":"54","author":"Yang","year":"2015","journal-title":"Appl. Opt."},{"key":"ref_138","doi-asserted-by":"crossref","first-page":"189","DOI":"10.1364\/JOT.79.000189","article-title":"Obtaining ruled diffraction gratings with a nonrectangular ruled zone","volume":"79","author":"Abrakhmanov","year":"2012","journal-title":"J. Opt. Technol."},{"key":"ref_139","first-page":"37","article-title":"Development of a numerically controlled ruling engine for stigmatic concave gratings","volume":"10","author":"Moriyama","year":"1976","journal-title":"Bull. Jpn. Soc. Precis. Eng."},{"key":"ref_140","doi-asserted-by":"crossref","first-page":"401","DOI":"10.1016\/j.optcom.2016.10.063","article-title":"Groove shape characteristics of echelle gratings with high diffraction efficiency","volume":"387","author":"Zhang","year":"2017","journal-title":"Opt. Commun."},{"key":"ref_141","unstructured":"Bach, K., and Bach, B. (April, January 27). Large-ruled monolithic echelle gratings. Proceedings of the Astronomical Telescopes and Instrumentation, Munich, Germany."},{"key":"ref_142","first-page":"473","article-title":"Design of the controller of the micro-positioning system for large diffraction grating ruling engine","volume":"36","author":"Mi","year":"2015","journal-title":"Chin. J. Sci. Instrum."},{"key":"ref_143","doi-asserted-by":"crossref","first-page":"27791","DOI":"10.1364\/OE.438235","article-title":"Method for fabricating large-area gratings with a uniform duty cycle without a spatial beam modulator","volume":"29","author":"Liang","year":"2021","journal-title":"Opt. Express"},{"key":"ref_144","first-page":"10","article-title":"Light field homogenization technology based on beam scanning","volume":"44","author":"Zhang","year":"2024","journal-title":"Acta Opt. Sin."},{"key":"ref_145","doi-asserted-by":"crossref","unstructured":"Armstrong, J.J., and Kessler, T.J. (1992, January 22). Holographic recording of large-aperture, high-efficiency, high-damage-threshold, transmission diffraction gratings. Proceedings of SPIE\u2014The International Society for Optical Engineering, San Diego, CA, USA.","DOI":"10.1117\/12.140754"},{"key":"ref_146","doi-asserted-by":"crossref","first-page":"41","DOI":"10.1038\/s41378-025-00889-4","article-title":"Global alignment reference strategy for laser interference lithography pattern arrays","volume":"11","author":"Gao","year":"2025","journal-title":"Microsyst. Nanoeng."},{"key":"ref_147","doi-asserted-by":"crossref","unstructured":"Shi, L., and Zeng, L.J. (2010, January 18\u201320). Fabrication of optical mosaic gratings by consecutive holographic exposures employing a latent-fringe based alignment technique. Proceedings of the Conference on Holography, Diffractive Optics, and Applications IV, Beijing, China.","DOI":"10.1117\/12.869727"},{"key":"ref_148","doi-asserted-by":"crossref","first-page":"68","DOI":"10.1016\/j.optcom.2015.10.017","article-title":"Method to fabricate orthogonal crossed gratings based on a dual Lloyd\u2019s mirror interferometer","volume":"360","author":"Zhou","year":"2016","journal-title":"Opt. Commun."},{"key":"ref_149","unstructured":"Zhou, H.Y., and Zeng, L.J. (2014, January 3\u20135). Fabrication of optical mosaic two-dimensional gratings with a dual Lloyd\u2019s mirror interferometer. Proceedings of the 11th Symposium on Laser Metrology for Precision Measurement and Inspection in Industry, Tsukuba, Japan."},{"key":"ref_150","doi-asserted-by":"crossref","first-page":"2640","DOI":"10.1116\/1.2127938","article-title":"Doppler writing and linewidth control for scanning beam interference lithography","volume":"23","author":"Montoya","year":"2005","journal-title":"J. Vac. Sci. Technol. B"},{"key":"ref_151","doi-asserted-by":"crossref","first-page":"2617","DOI":"10.1116\/1.1520563","article-title":"Generalized scanning beam interference lithography system for patterning gratings with variable period progressions","volume":"20","author":"Pati","year":"2002","journal-title":"J. Vac. Sci. Technol. B"},{"key":"ref_152","unstructured":"Schattenburg, M., Chen, C., Heilmann, R., Konkola, P., and Pati, G. (August, January 29). Progress toward a general grating patterning technology using phase-locked scanning beams. Proceedings of the International Symposium on Optical Science and Technology, San Diego, CA, USA."},{"key":"ref_153","doi-asserted-by":"crossref","first-page":"4649","DOI":"10.1515\/nanoph-2022-0371","article-title":"A large-size and polarization-independent two dimensional grating fabricated by scanned reactive-ion-beam etching","volume":"11","author":"Zhang","year":"2022","journal-title":"Nanophotonics"},{"key":"ref_154","doi-asserted-by":"crossref","first-page":"938","DOI":"10.37188\/OPE.20223008.0938","article-title":"Design on constant coherent light intensity fringe locking system for scanning beam interference lithography","volume":"30","author":"Wang","year":"2022","journal-title":"Opt. Precis. Eng."},{"key":"ref_155","doi-asserted-by":"crossref","first-page":"2342","DOI":"10.1116\/1.1410096","article-title":"Digital heterodyne interference fringe control system","volume":"19","author":"Heilmann","year":"2001","journal-title":"J. Vac. Sci. Technol. B"},{"key":"ref_156","doi-asserted-by":"crossref","first-page":"0405001","DOI":"10.3788\/AOS201939.0405001","article-title":"Design of 3D locking system for interference fringes of holographic grating","volume":"39","author":"Qian","year":"2019","journal-title":"Acta Opt. Sin."},{"key":"ref_157","doi-asserted-by":"crossref","first-page":"112254","DOI":"10.1016\/j.optlastec.2024.112254","article-title":"Fringe locking system with large phase compensation range for holographic exposure systems with arbitrary recording wavefronts","volume":"183","author":"Xu","year":"2025","journal-title":"Opt. Laser Technol."},{"key":"ref_158","doi-asserted-by":"crossref","unstructured":"Li, J., Zhong, Z., Shao, C., and Li, X. (2024, January 12\u201314). Multireference fringe locking technique for interference lithography. Proceedings of the SPIE\/COS Photonics Asia, Nantong, China.","DOI":"10.1117\/12.3036327"},{"key":"ref_159","doi-asserted-by":"crossref","first-page":"216","DOI":"10.1016\/j.precisioneng.2025.01.006","article-title":"High dynamic wavefront stability control for high-uniformity periodic microstructure fabrication","volume":"93","author":"Zhong","year":"2025","journal-title":"Precis. Eng."},{"key":"ref_160","doi-asserted-by":"crossref","unstructured":"Li, C., Chen, X., Wu, J., Ju, J., Zhu, Y., and Hu, Z. (2009, January 17\u201319). Research and development of a stabilizing holographic interference fringe system based on linear CCD. Proceedings of the International Symposium on Photoelectronic Detection and Imaging 2009, Beijing, China.","DOI":"10.1117\/12.834450"},{"key":"ref_161","doi-asserted-by":"crossref","first-page":"21530","DOI":"10.1364\/OE.17.021530","article-title":"Fabrication of optical mosaic gratings with phase and attitude adjustments employing latent fringes and a red-wavelength dual-beam interferometer","volume":"17","author":"Shi","year":"2009","journal-title":"Opt. Express"},{"key":"ref_162","first-page":"339","article-title":"Effect of phase changes of interference fringes on exposure of plane holographic gratings","volume":"40","author":"Song","year":"2016","journal-title":"Laser Technol."},{"key":"ref_163","doi-asserted-by":"crossref","first-page":"318","DOI":"10.3788\/OPE.20142202.0318","article-title":"Design of frequency-shift interference fringe locking system in holographic grating exposure","volume":"22","author":"Song","year":"2014","journal-title":"Opt. Precis. Eng."},{"key":"ref_164","first-page":"722","article-title":"Design of phase locking system for an interference lithography scanner","volume":"55","author":"Wang","year":"2015","journal-title":"J. Tsinghua Univ. Sci. Technol."},{"key":"ref_165","doi-asserted-by":"crossref","first-page":"13","DOI":"10.1117\/1.OE.60.6.064107","article-title":"Analysis and design of fringe phase control system for scanning beam interference lithography","volume":"60","author":"Lu","year":"2021","journal-title":"Opt. Eng."},{"key":"ref_166","unstructured":"Sen, L., Kaiming, Y., Yu, Z., Leijie, W., and Ming, Z. (2020, January 7\u201311). Optimal control for stabilizing fringe phase in interference lithography. Proceedings of the 2020 IEEE 5th Optoelectronics Global Conference (OGC), Shenzhen, China."},{"key":"ref_167","doi-asserted-by":"crossref","first-page":"40086","DOI":"10.1364\/OE.502315","article-title":"Optical interference phase control method with single photodetector for interference lithography","volume":"31","author":"Cao","year":"2023","journal-title":"Opt. Express"},{"key":"ref_168","doi-asserted-by":"crossref","first-page":"0509001","DOI":"10.3788\/CJL201744.0509001","article-title":"Interference fringe locking by grating-shifting holographic grating exposure","volume":"44","author":"Song","year":"2017","journal-title":"Chin. J. Lasers"},{"key":"ref_169","doi-asserted-by":"crossref","first-page":"3097","DOI":"10.1116\/1.1610003","article-title":"Nanometer-level repeatable metrology using the Nanoruler","volume":"21","author":"Konkola","year":"2003","journal-title":"J. Vac. Sci. Technol. B"},{"key":"ref_170","unstructured":"Dixit, S.N., Britten, J.A., Hyde, R.A., Hoaglan, C.R., Rushford, M.C., Summers, L.J., and Toeppen, J.S. (August, January 29). Fabrication and applications of large-aperture diffractive optics. Proceedings of the International Symposium on Optical Science and Technology, San Diego, CA, USA."},{"key":"ref_171","doi-asserted-by":"crossref","first-page":"133","DOI":"10.3788\/OPE.20172501.0133","article-title":"Meter-scale thin film coating equipment based on meniscus-coating technology","volume":"25","author":"Xu","year":"2017","journal-title":"Opt. Precis. Eng."},{"key":"ref_172","first-page":"121003","article-title":"Improvement of film thickness uniformity in meniscus coating","volume":"27","author":"Lin","year":"2015","journal-title":"High Power Laser Part. Beams"},{"key":"ref_173","first-page":"1101028","article-title":"Intertwined development of near-infrared high-power lasers and reflective holographic surface-relief diffraction gratings","volume":"51","author":"Jin","year":"2024","journal-title":"Chin. J. Lasers"},{"key":"ref_174","doi-asserted-by":"crossref","unstructured":"Han, Y.X., Li, Z.Y., Jin, Y.X., Cao, H.C., Kong, F.Y., and Shao, J.D. (2023, January 14\u201316). Ultra-broadband and large aperture gratings for single-cycle Exawatt lasers. Proceedings of the Conference on Advanced Lasers, High-Power Lasers, and Applications XIV, Beijing, China.","DOI":"10.1117\/12.2686846"},{"key":"ref_175","unstructured":"(2024, December 21). Shanghai Institute of Optics and Mechanics Has Developed the World\u2019s Largest ~2 m Seamless Pulse Compression Grating. Available online: https:\/\/siom.cas.cn\/jgsz\/bomo\/xwdt_146730\/202311\/t20231128_6898849.html."},{"key":"ref_176","doi-asserted-by":"crossref","unstructured":"Aono, Y., Negishi, M., and Takano, J. (2000, January 1\u20134). Development of large-aperture aspherical lens with glass molding. Proceedings of the International Topical Symposium on Advanced Optical Manufacturing and Testing Technology, Chengdu, China.","DOI":"10.1117\/12.402759"},{"key":"ref_177","unstructured":"Ke, X.L., Liu, J.C., and Huang, H.B. (2013, January 13\u201314). Study on precision grinding technique for large size optical aspheric lens. Proceedings of the 3rd International Conference on Advanced Design and Manufacturing Engineering (ADME 2013), Anshan, China."},{"key":"ref_178","doi-asserted-by":"crossref","first-page":"263","DOI":"10.1016\/0030-3992(95)00098-4","article-title":"Phase synthesis of a holographic metrological diffraction grating of unlimited length","volume":"28","author":"Turukhano","year":"1996","journal-title":"Opt. Laser Technol."},{"key":"ref_179","doi-asserted-by":"crossref","first-page":"1943","DOI":"10.3788\/AOS20092907.1943","article-title":"Research on the multi-exposure method to fabricate pulse compression mosaic grating","volume":"29","author":"Li","year":"2009","journal-title":"Acta Opt. Sin."},{"key":"ref_180","first-page":"9","article-title":"Parallel splicing method for holographic gratings","volume":"42","author":"Qian","year":"2022","journal-title":"Acta Opt. Sin."},{"key":"ref_181","unstructured":"Qiu, K., Chen, H., and Liu, Y. (2018, January 9\u201314). Meter-scale pulse-compression gratings for high power laser systems in China. Proceedings of the International Committee for Ultra-High Intensity Lasers Conference, Lindau, Germany."},{"key":"ref_182","doi-asserted-by":"crossref","first-page":"8985","DOI":"10.1364\/OE.19.008985","article-title":"Fabrication of optical mosaic gratings: A self-referencing alignment method","volume":"19","author":"Shi","year":"2011","journal-title":"Opt. Express"},{"key":"ref_183","unstructured":"Konkola, P. (2003). Design and analysis of a scanning beam interference lithography system for patterning gratings with nanometer-level distortions. [Ph.D. Thesis, Massachusetts Institute of Technology]."},{"key":"ref_184","doi-asserted-by":"crossref","unstructured":"Ma, D.H., Zhao, Y.X., and Zeng, L.J. (2017). Achieving unlimited recording length in interference lithography via broad-beam scanning exposure with self-referencing alignment. Sci. Rep., 7.","DOI":"10.1038\/s41598-017-01099-3"},{"key":"ref_185","doi-asserted-by":"crossref","first-page":"4048","DOI":"10.1364\/AO.389274","article-title":"Numerical calculation of the mosaic error between mosaic gratings","volume":"59","author":"Yang","year":"2020","journal-title":"Appl. Opt."},{"key":"ref_186","doi-asserted-by":"crossref","unstructured":"Napier, B., and Phillips, N. (1997, January 8\u201314). Use of real-time latent images to write long holographic diffraction gratings in photoresist. Proceedings of the Electronic Imaging, San Jose, CA, USA.","DOI":"10.1117\/12.271351"},{"key":"ref_187","unstructured":"Zeng, L.J., Shi, L., and Li, L.F. (July, January 29). Fabrication of large grating by monitoring the latent fringe pattern. Proceedings of the 9th International Symposium on Measurement Technology and Intelligent Instruments, St. Petersburg, Russia."},{"key":"ref_188","doi-asserted-by":"crossref","unstructured":"Gao, X., Zhong, Z., Lu, T., Li, J., and Li, X. (2024, January 12\u201314). Fabrication of optical mosaic gratings. Proceedings of the SPIE\/COS Photonics Asia, Nantong, China.","DOI":"10.1117\/12.3036399"},{"key":"ref_189","doi-asserted-by":"crossref","first-page":"3177","DOI":"10.3788\/HPLPB20112312.3177","article-title":"Laser pulse pattern influenced by mosaic grating gap","volume":"23","author":"Qian","year":"2011","journal-title":"High Power Laser Part. Beams"},{"key":"ref_190","unstructured":"Zhao, Y. (2008). Ultra-High Precision Scanning Beam Interference Lithography and Its Application: Spatial Frequency Multiplication. [Ph.D. Thesis, MIT]."},{"key":"ref_191","doi-asserted-by":"crossref","first-page":"032002","DOI":"10.1088\/1742-6596\/112\/3\/032002","article-title":"Development of 91 cm size gratings and mirrors for LEFX laser system","volume":"112","author":"Jitsuno","year":"2008","journal-title":"J. Phys. Conf. Ser."},{"key":"ref_192","doi-asserted-by":"crossref","first-page":"0705001","DOI":"10.3788\/AOS201535.0705001","article-title":"An accurate method for measuring interference fringe period in scanning beam interference lithography system","volume":"35","author":"Jiang","year":"2015","journal-title":"Acta Opt. Sin."},{"key":"ref_193","doi-asserted-by":"crossref","first-page":"4138","DOI":"10.1364\/AO.56.004138","article-title":"Beam drift error and control technology for scanning beam interference lithography","volume":"56","author":"Wang","year":"2017","journal-title":"Appl. Opt."},{"key":"ref_194","doi-asserted-by":"crossref","first-page":"10312","DOI":"10.1364\/OE.25.010312","article-title":"Precision measurement of X-axis stage mirror profile in scanning beam interference lithography by three-probe system based on bidirectional integration model","volume":"25","author":"Liu","year":"2017","journal-title":"Opt. Express"},{"key":"ref_195","doi-asserted-by":"crossref","first-page":"37066","DOI":"10.1364\/OE.437593","article-title":"Active control technology of a diffraction grating wavefront by scanning beam interference lithography","volume":"29","author":"Liu","year":"2021","journal-title":"Opt. Express"},{"key":"ref_196","doi-asserted-by":"crossref","first-page":"2641","DOI":"10.1364\/AO.58.002641","article-title":"Scan angle error measurement based on phase-stepping algorithms in scanning beam interference lithography","volume":"58","author":"Li","year":"2019","journal-title":"Appl. Opt."},{"key":"ref_197","doi-asserted-by":"crossref","first-page":"1346","DOI":"10.1364\/OL.40.001346","article-title":"Fabrication of low-stray-light gratings by broad-beam scanning exposure in the direction perpendicular to the grating grooves","volume":"40","author":"Ma","year":"2015","journal-title":"Opt. Lett."},{"key":"ref_198","doi-asserted-by":"crossref","first-page":"112","DOI":"10.1038\/s41377-025-01785-2","article-title":"Controlling the wavefront aberration of a large-aperture and high-precision holographic diffraction grating","volume":"14","author":"Li","year":"2025","journal-title":"Light Sci. Appl."}],"container-title":["Sensors"],"original-title":[],"language":"en","link":[{"URL":"https:\/\/www.mdpi.com\/1424-8220\/25\/7\/1990\/pdf","content-type":"unspecified","content-version":"vor","intended-application":"similarity-checking"}],"deposited":{"date-parts":[[2025,10,9]],"date-time":"2025-10-09T16:58:30Z","timestamp":1760029110000},"score":1,"resource":{"primary":{"URL":"https:\/\/www.mdpi.com\/1424-8220\/25\/7\/1990"}},"subtitle":[],"short-title":[],"issued":{"date-parts":[[2025,3,22]]},"references-count":198,"journal-issue":{"issue":"7","published-online":{"date-parts":[[2025,4]]}},"alternative-id":["s25071990"],"URL":"https:\/\/doi.org\/10.3390\/s25071990","relation":{},"ISSN":["1424-8220"],"issn-type":[{"value":"1424-8220","type":"electronic"}],"subject":[],"published":{"date-parts":[[2025,3,22]]}}}