{"status":"ok","message-type":"work","message-version":"1.0.0","message":{"indexed":{"date-parts":[[2026,7,2]],"date-time":"2026-07-02T04:15:25Z","timestamp":1782965725151,"version":"3.54.5"},"reference-count":17,"publisher":"MDPI AG","issue":"24","license":[{"start":{"date-parts":[[2025,12,11]],"date-time":"2025-12-11T00:00:00Z","timestamp":1765411200000},"content-version":"vor","delay-in-days":0,"URL":"https:\/\/creativecommons.org\/licenses\/by\/4.0\/"}],"funder":[{"DOI":"10.13039\/501100001665","name":"French National Research Agency","doi-asserted-by":"crossref","award":["ANR-18-CE04-0002-01"],"award-info":[{"award-number":["ANR-18-CE04-0002-01"]}],"id":[{"id":"10.13039\/501100001665","id-type":"DOI","asserted-by":"crossref"}]},{"name":"R\u00e9gion Languedoc-Roussillon"}],"content-domain":{"domain":[],"crossmark-restriction":false},"short-container-title":["Sensors"],"abstract":"<jats:p>To address the lack of compact and high-performance gas sensors in the literature, a miniaturized photoacoustic sensor has been developed using a resonant capacitive MEMS specifically designed for gas detection. Its performance is enhanced by coupling it to a T-shaped acoustic cavity, which confines and directs the acoustic waves toward the transducer. Electrical and photoacoustic characterizations were carried out to determine the nominal capacitance and resonance frequency of the device. The acoustic coupling resulted in a significant improvement in the transducer\u2019s mechanical response, while the linearity of the sensor was confirmed over a broad concentration range. This improvement led to a reduction in the limit of detection (LOD) from 186 ppmv to 16 ppmv. In parallel, the Normalized Noise-Equivalent Absorption (NNEA) metric improved from 1.49\u00d710\u22127W\u00b7cm\u22121\u00b7Hz\u22121\/2 to 1.28\u00d710\u22128W\u00b7cm\u22121\u00b7Hz\u22121\/2, representing a 11-fold increase in sensitivity. Stability over time is confirmed through Allan\u2013Werle deviation analysis, confirming the reliability of the signal over extended measurement periods. These results demonstrate that coupling a resonant MEMS transducer to a well-designed acoustic cavity is an efficient strategy to significantly improve the sensitivity of photoacoustic gas detection systems.<\/jats:p>","DOI":"10.3390\/s25247523","type":"journal-article","created":{"date-parts":[[2025,12,11]],"date-time":"2025-12-11T11:17:27Z","timestamp":1765451847000},"page":"7523","update-policy":"https:\/\/doi.org\/10.3390\/mdpi_crossmark_policy","source":"Crossref","is-referenced-by-count":1,"title":["Resonant Capacitive MEMS Coupled to a T-Shaped Acoustic Cavity for Enhanced Photoacoustic Gas Detection"],"prefix":"10.3390","volume":"25","author":[{"ORCID":"https:\/\/orcid.org\/0009-0002-0085-2820","authenticated-orcid":false,"given":"Fanny","family":"Pages","sequence":"first","affiliation":[{"name":"Institut d\u2019\u00c9lectronique et des Syst\u00e8mes (IES), Centre National de la Recherche Scientifique (CNRS), Univ Montpellier, 34095 Montpellier, France"}],"role":[{"vocabulary":"crossref","role":"author"}]},{"given":"Julien","family":"Charensol","sequence":"additional","affiliation":[{"name":"Institut d\u2019\u00c9lectronique et des Syst\u00e8mes (IES), Centre National de la Recherche Scientifique (CNRS), Univ Montpellier, 34095 Montpellier, France"}],"role":[{"vocabulary":"crossref","role":"author"}]},{"given":"Tarek","family":"Seoudi","sequence":"additional","affiliation":[{"name":"Institut d\u2019\u00c9lectronique et des Syst\u00e8mes (IES), Centre National de la Recherche Scientifique (CNRS), Univ Montpellier, 34095 Montpellier, France"}],"role":[{"vocabulary":"crossref","role":"author"}]},{"given":"Julie","family":"Goutorbe","sequence":"additional","affiliation":[{"name":"Institut d\u2019\u00c9lectronique et des Syst\u00e8mes (IES), Centre National de la Recherche Scientifique (CNRS), Univ Montpellier, 34095 Montpellier, France"}],"role":[{"vocabulary":"crossref","role":"author"}]},{"given":"Loni","family":"Laporte","sequence":"additional","affiliation":[{"name":"Institut d\u2019\u00c9lectronique et des Syst\u00e8mes (IES), Centre National de la Recherche Scientifique (CNRS), Univ Montpellier, 34095 Montpellier, France"}],"role":[{"vocabulary":"crossref","role":"author"}]},{"ORCID":"https:\/\/orcid.org\/0009-0000-9406-7836","authenticated-orcid":false,"given":"Diba","family":"Ayache","sequence":"additional","affiliation":[{"name":"Institut d\u2019\u00c9lectronique et des Syst\u00e8mes (IES), Centre National de la Recherche Scientifique (CNRS), Univ Montpellier, 34095 Montpellier, France"}],"role":[{"vocabulary":"crossref","role":"author"}]},{"ORCID":"https:\/\/orcid.org\/0009-0002-5846-2083","authenticated-orcid":false,"given":"Fadia Abou","family":"Naoum","sequence":"additional","affiliation":[{"name":"Institut d\u2019\u00c9lectronique et des Syst\u00e8mes (IES), Centre National de la Recherche Scientifique (CNRS), Univ Montpellier, 34095 Montpellier, France"}],"role":[{"vocabulary":"crossref","role":"author"}]},{"ORCID":"https:\/\/orcid.org\/0000-0002-6399-882X","authenticated-orcid":false,"given":"Eric","family":"Rosenkrantz","sequence":"additional","affiliation":[{"name":"Institut d\u2019\u00c9lectronique et des Syst\u00e8mes (IES), Centre National de la Recherche Scientifique (CNRS), Univ Montpellier, 34095 Montpellier, France"}],"role":[{"vocabulary":"crossref","role":"author"}]},{"ORCID":"https:\/\/orcid.org\/0000-0002-5709-3151","authenticated-orcid":false,"given":"Aurore","family":"Vicet","sequence":"additional","affiliation":[{"name":"Institut d\u2019\u00c9lectronique et des Syst\u00e8mes (IES), Centre National de la Recherche Scientifique (CNRS), Univ Montpellier, 34095 Montpellier, France"}],"role":[{"vocabulary":"crossref","role":"author"}]},{"ORCID":"https:\/\/orcid.org\/0000-0001-6819-1067","authenticated-orcid":false,"given":"Michael","family":"Bahriz","sequence":"additional","affiliation":[{"name":"Institut d\u2019\u00c9lectronique et des Syst\u00e8mes (IES), Centre National de la Recherche Scientifique (CNRS), Univ Montpellier, 34095 Montpellier, France"}],"role":[{"vocabulary":"crossref","role":"author"}]}],"member":"1968","published-online":{"date-parts":[[2025,12,11]]},"reference":[{"key":"ref_1","doi-asserted-by":"crossref","first-page":"507","DOI":"10.1016\/j.jlp.2016.02.004","article-title":"A review on understanding explosions from methane\u2013air mixture","volume":"40","author":"Kundu","year":"2016","journal-title":"J. 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