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Lithium niobate (LiNbO3) is a promising material, but the growth of high-quality thin films remains challenging because of lithium volatility and process-control issues. In this work, chemical beam epitaxy (CBE) was investigated as an alternative route for the deposition of c-axis-oriented LiNbO3 thin films on C-plane sapphire at a relatively low growth temperature of 400 \u00b0C. Structural characterization confirmed high crystalline quality, with clear (006) and (0012) XRD reflections and a rocking-curve full width at half maximum of 0.04\u00b0. To evaluate acoustic performance, a SAW delay line and a one-port resonator were fabricated on 350 nm thick films using e-beam lithography. The devices operated in the 1\u20133 GHz range and exhibited electromechanical coupling factors of about 0.3% for the Rayleigh mode at 1.7 GHz and 3% for the Sezawa mode at 2.75 GHz. Propagation velocities ranged from 5094 to 8250 m\/s, and the Rayleigh-mode resonator quality factor reached about 500. These results demonstrate the feasibility of CBE-grown LiNbO3 films for SAW device applications.<\/jats:p>","DOI":"10.3390\/s26092858","type":"journal-article","created":{"date-parts":[[2026,5,4]],"date-time":"2026-05-04T01:12:09Z","timestamp":1777857129000},"page":"2858","update-policy":"https:\/\/doi.org\/10.3390\/mdpi_crossmark_policy","source":"Crossref","is-referenced-by-count":0,"title":["C-Axis Oriented LiNbO3 Thin Film Grown by Chemical Beam Epitaxy for Surface Acoustic Wave Device Applications"],"prefix":"10.3390","volume":"26","author":[{"ORCID":"https:\/\/orcid.org\/0000-0002-3947-1278","authenticated-orcid":false,"given":"Nikolay","family":"Smagin","sequence":"first","affiliation":[{"name":"Institut d\u2019\u00c9lectronique de Micro\u00e9lectronique et de Nanotechnologie (IEMN), UMR CNRS 8520, Universit\u00e9 Polytechnique Hauts-de-France, CNRS, Universit\u00e9 de Lille, 59313 Valenciennes, France"}],"role":[{"vocabulary":"crossref","role":"author"}]},{"ORCID":"https:\/\/orcid.org\/0000-0003-4675-7423","authenticated-orcid":false,"given":"Thanh Ngoc Kim","family":"Bui","sequence":"additional","affiliation":[{"name":"Institut d\u2019\u00c9lectronique de Micro\u00e9lectronique et de Nanotechnologie (IEMN), UMR CNRS 8520, Universit\u00e9 Polytechnique Hauts-de-France, CNRS, Universit\u00e9 de Lille, 59313 Valenciennes, France"},{"name":"3D-Oxides, 41 Rue Henri Fabre, 01630 Saint-Genis-Pouilly, France"}],"role":[{"vocabulary":"crossref","role":"author"}]},{"given":"Zakariae","family":"Oumekloul","sequence":"additional","affiliation":[{"name":"Institut d\u2019\u00c9lectronique de Micro\u00e9lectronique et de Nanotechnologie (IEMN), UMR CNRS 8520, Universit\u00e9 Polytechnique Hauts-de-France, CNRS, Universit\u00e9 de Lille, 59313 Valenciennes, 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d\u2019\u00c9lectronique de Micro\u00e9lectronique et de Nanotechnologie (IEMN), UMR CNRS 8520, Universit\u00e9 Polytechnique Hauts-de-France, CNRS, Universit\u00e9 de Lille, 59313 Valenciennes, France"}],"role":[{"vocabulary":"crossref","role":"author"}]},{"given":"Rayen Kalai","family":"Mathlouthi","sequence":"additional","affiliation":[{"name":"Institut d\u2019\u00c9lectronique de Micro\u00e9lectronique et de Nanotechnologie (IEMN), UMR CNRS 8520, Universit\u00e9 Polytechnique Hauts-de-France, CNRS, Universit\u00e9 de Lille, 59313 Valenciennes, France"}],"role":[{"vocabulary":"crossref","role":"author"}]},{"given":"Yves","family":"Deblock","sequence":"additional","affiliation":[{"name":"Institut d\u2019\u00c9lectronique de Micro\u00e9lectronique et de Nanotechnologie (IEMN), UMR CNRS 8520, Universit\u00e9 Polytechnique Hauts-de-France, CNRS, Universit\u00e9 de Lille, 59313 Valenciennes, 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104)."},{"key":"ref_3","doi-asserted-by":"crossref","first-page":"1546","DOI":"10.1109\/JSEN.2009.2027403","article-title":"Orthogonal Frequency Coded SAW Sensors for Aerospace SHM Applications","volume":"9","author":"Wilson","year":"2009","journal-title":"IEEE Sens. J."},{"key":"ref_4","doi-asserted-by":"crossref","first-page":"6910","DOI":"10.3390\/s130606910","article-title":"Surface Acoustic Wave Devices for Harsh Environment Wireless Sensing","volume":"13","author":"Greve","year":"2013","journal-title":"Sensors"},{"key":"ref_5","doi-asserted-by":"crossref","unstructured":"Mujahid, A., and Dickert, F.L. (2017). Surface Acoustic Wave (SAW) for Chemical Sensing Applications of Recognition Layers. Sensors, 17.","DOI":"10.3390\/s17122716"},{"key":"ref_6","doi-asserted-by":"crossref","unstructured":"Takai, T., Iwamoto, H., Takamine, Y., Yamazaki, H., Fuyutsume, T., Kyoya, H., Nakao, T., Kando, H., Hiramoto, M., and Toi, T. (2016, January 18\u201321). Incredible High Performance SAW Resonator on Novel Multi-Layerd Substrate. Proceedings of the 2016 IEEE International Ultrasonics Symposium (IUS), Tours, France.","DOI":"10.1109\/ULTSYM.2016.7728455"},{"key":"ref_7","unstructured":"Ruby, R., and Merchant, P. (1994, January 1\u20133). Micromachined Thin Film Bulk Acoustic Resonators. Proceedings of the IEEE 48th Annual Symposium on Frequency Control, Boston, MA, USA."},{"key":"ref_8","unstructured":"Aigner, R., Ella, J., Timme, H.-J., Elbrecht, L., Nessler, W., and Marksteiner, S. (2002, January 8\u201311). Advancement of MEMS into RF-Filter Applications. Proceedings of the Digest. International Electron Devices Meeting, San Francisco, CA, USA."},{"key":"ref_9","doi-asserted-by":"crossref","unstructured":"Plessky, V., Yandrapalli, S., Turner, P.J., Villanueva, L.G., Koskela, J., Faizan, M., De Pastina, A., Garcia, B., Costa, J., and Hammond, R.B. (2019, January 2\u20137). Laterally Excited Bulk Wave Resonators (XBARs) Based on Thin Lithium Niobate Platelet for 5GHz and 13 GHz Filters. Proceedings of the 2019 IEEE MTT-S International Microwave Symposium (IMS), Boston, MA, USA.","DOI":"10.1109\/MWSYM.2019.8700876"},{"key":"ref_10","unstructured":"Wang, Y., and Jiang, Y. (2009, January 23\u201327). Dielectric and Piezoelectric Anisotropy of Lithium Niobate and Lithium Tantalate Single Crystals. Proceedings of the 2009 18th IEEE International Symposium on the Applications of Ferroelectrics, Xi\u2019an, China."},{"key":"ref_11","unstructured":"Nikogosyan, D. (2005). Nonlinear Optical Crystals: A Complete Survey, Springer."},{"key":"ref_12","doi-asserted-by":"crossref","first-page":"040603","DOI":"10.1063\/1.4931601","article-title":"Optical Waveguides in Lithium Niobate: Recent Developments and Applications","volume":"2","author":"Bazzan","year":"2015","journal-title":"Appl. Phys. Rev."},{"key":"ref_13","doi-asserted-by":"crossref","first-page":"3911","DOI":"10.1038\/s41467-020-17806-0","article-title":"High-Performance Coherent Optical Modulators Based on Thin-Film Lithium Niobate Platform","volume":"11","author":"Xu","year":"2020","journal-title":"Nat. Commun."},{"key":"ref_14","doi-asserted-by":"crossref","unstructured":"Chen, K., Zhu, Y., Liu, Z., and Xue, D. (2021). State of the Art in Crystallization of LiNbO3 and Their Applications. Molecules, 26.","DOI":"10.3390\/molecules26227044"},{"key":"ref_15","doi-asserted-by":"crossref","first-page":"12679","DOI":"10.1109\/JSEN.2020.3002861","article-title":"LiNbO3-Based SAW Sensors Capable to Measure up to 1100 \u00b0C High Temperature","volume":"20","author":"Weng","year":"2020","journal-title":"IEEE Sens. J."},{"key":"ref_16","doi-asserted-by":"crossref","unstructured":"Ballandras, S., Courjon, E., Bernard, F., Laroche, T., Clairet, A., Radu, I., Huyet, I., Drouin, A., and Butaud, E. (2019, January 14\u201318). New Generation of SAW Devices on Advanced Engineered Substrates Combining Piezoelectric Single Crystals and Silicon. Proceedings of the 2019 Joint Conference of the IEEE International Frequency Control Symposium and European Frequency and Time Forum (EFTF\/IFC), Orlando, FL, USA.","DOI":"10.1109\/FCS.2019.8855991"},{"key":"ref_17","doi-asserted-by":"crossref","first-page":"225","DOI":"10.1149\/1.3483511","article-title":"LiNbO3 Single Crystal Layer Transfer Techniques for High Performances RF Filters","volume":"33","author":"Deguet","year":"2010","journal-title":"ECS Trans."},{"key":"ref_18","doi-asserted-by":"crossref","unstructured":"Tanaka, S., Guo, Y., and Kadota, M. (2024, January 13\u201315). Evolution of SAW and BAW Devices Using Thin LiTaO3 and LiNbO3. Proceedings of the IEEE MTT-S International Conference on Microwave Acoustics and Mechanics, IC-MAM 2024, Chengdu, China.","DOI":"10.1109\/IC-MAM60575.2024.10538491"},{"key":"ref_19","unstructured":"Rogers, D.J., Look, D.C., and Teherani, F.H. (2021). Chemical Beam Vapour Deposition Technique with Sybilla Equipment: Review of Main Results in Its 20-Year Anniversary. Proceedings of the Oxide-Based Materials and Devices XII, Online, 6\u201311 March 2021, SPIE."},{"key":"ref_20","doi-asserted-by":"crossref","unstructured":"Zivasatienraj, B., Tellekamp, M.B., and Doolittle, W.A. (2021). Epitaxy of LiNbO3: Historical Challenges and Recent Success. Crystals, 11.","DOI":"10.3390\/cryst11040397"},{"key":"ref_21","doi-asserted-by":"crossref","first-page":"2300535","DOI":"10.1002\/admi.202300535","article-title":"Efficient Optimization of High-Quality Epitaxial Lithium Niobate Thin Films by Chemical Beam Vapor Deposition: Impact of Cationic Stoichiometry","volume":"10","author":"Pellegrino","year":"2023","journal-title":"Adv. Mater. Interfaces"},{"key":"ref_22","doi-asserted-by":"crossref","first-page":"203","DOI":"10.1021\/cg1011583","article-title":"Combinatorial High-Vacuum Chemical Vapor Deposition of Textured Hafnium-Doped Lithium Niobate Thin Films on Sapphire","volume":"11","author":"Dabirian","year":"2011","journal-title":"Cryst. Growth Des."},{"key":"ref_23","unstructured":"Bui, N.K.T., Smagin, N., Oumekloul, Z., Moalla, R., Maudez, W., Wagner, E., Benvenuti, G., Duquennoy, M., Remiens, D., and Carlier, J. (2023, January 27\u201329). Fabrication of C-Axis LiNbO3 Thin Film for Surface Acoustic Wave Applications. Proceedings of the Workshop for Multi-Functional Materials: From Synthesis to Applications, Valenciennes, France."},{"key":"ref_24","doi-asserted-by":"crossref","first-page":"A1635","DOI":"10.1103\/PhysRev.139.A1635","article-title":"Behavior of Coherent Microwave Phonons at Low Temperatures in Al2O3 Using Vapor-Deposited Thin-Film Piezoelectric Transducers","volume":"139","year":"1965","journal-title":"Phys. Rev."},{"key":"ref_25","doi-asserted-by":"crossref","first-page":"411","DOI":"10.1016\/S0040-6090(02)01190-2","article-title":"High Uniformity Deposition with Chemical Beams in High Vacuum","volume":"427","author":"Benvenuti","year":"2003","journal-title":"Thin Solid Films"},{"key":"ref_26","doi-asserted-by":"crossref","unstructured":"Bui, T.N.K., Wagner, E., Moalla, R., Maudez, W., Dogheche, K., Bachelet, R., Masenelli, B., Benvenuti, G., R\u00e9miens, D., and Dogheche, E.H. (2024). Growth of Low-Temperature Epitaxial Lithium Niobate Thin Films and Guided-Wave Optical Properties. Photonics, 11.","DOI":"10.3390\/photonics11100895"},{"key":"ref_27","doi-asserted-by":"crossref","first-page":"205901","DOI":"10.1088\/0953-8984\/25\/20\/205901","article-title":"Identification of LiNbO3, LiNb3O8 and Li3NbO4 Phases in Thin Films Synthesized with Different Deposition Techniques by Means of XRD and Raman Spectroscopy","volume":"25","author":"Bartasyte","year":"2013","journal-title":"J. Phys. Condens. Matter"},{"key":"ref_28","doi-asserted-by":"crossref","first-page":"209","DOI":"10.1109\/JMEMS.2019.2892708","article-title":"Accurate Extraction of Large Electromechanical Coupling in Piezoelectric MEMS Resonators","volume":"28","author":"Lu","year":"2019","journal-title":"J. Microelectromech. Syst."},{"key":"ref_29","doi-asserted-by":"crossref","first-page":"717","DOI":"10.1109\/TUFFC.1996.535477","article-title":"Publication and Proposed Revision of ANSI\/IEEE Standard 176-1987 \u201cANSI\/IEEE Standard on Piezoelectricity\u201d","volume":"43","author":"Meeker","year":"1996","journal-title":"IEEE Trans. Ultrason. Ferroelectr. Freq. Control."},{"key":"ref_30","doi-asserted-by":"crossref","unstructured":"Hashimoto, K. (2000). Surface Acoustic Wave Devices in Telecommunications, Springer.","DOI":"10.1007\/978-3-662-04223-6"},{"key":"ref_31","doi-asserted-by":"crossref","first-page":"1600998","DOI":"10.1002\/admi.201600998","article-title":"Toward High-Quality Epitaxial LiNbO3 and LiTaO3 Thin Films for Acoustic and Optical Applications","volume":"4","author":"Bartasyte","year":"2017","journal-title":"Adv. Mater. Interfaces"},{"key":"ref_32","doi-asserted-by":"crossref","unstructured":"Huang, S., Shuai, Y., Lv, L., Wei, Z., Fan, W., Wang, Y., Zhu, D., Pan, X., Luo, W., and Wu, C. (2023). LiNbO3 Surface Acoustic Wave Resonators with Large Effective Electromechanical Coupling. Electronics, 12.","DOI":"10.3390\/electronics12132964"},{"key":"ref_33","doi-asserted-by":"crossref","first-page":"5185","DOI":"10.1109\/TMTT.2022.3194554","article-title":"Surface-Acoustic-Wave Devices Based on Lithium Niobate and Amorphous Silicon Thin Films on a Silicon Substrate","volume":"70","author":"Yang","year":"2022","journal-title":"IEEE Trans. Microw. Theory Tech."},{"key":"ref_34","doi-asserted-by":"crossref","first-page":"07HD10","DOI":"10.1143\/JJAP.50.07HD10","article-title":"Properties of LiNbO3 Thin Film Deposited by Chemical Vapor Deposition and Frequency Characteristics of Film Bulk Acoustic Wave Resonator","volume":"50","author":"Kadota","year":"2011","journal-title":"Jpn. J. Appl. Phys."},{"key":"ref_35","doi-asserted-by":"crossref","first-page":"162905","DOI":"10.1063\/1.5086757","article-title":"High-Frequency Surface Acoustic Wave Devices Based on Epitaxial Z-LiNbO3 Layers on Sapphire","volume":"114","author":"Almirall","year":"2019","journal-title":"Appl. Phys. Lett."},{"key":"ref_36","doi-asserted-by":"crossref","first-page":"172202","DOI":"10.1063\/5.0142417","article-title":"Dispersion of Surface Elastic Waves on Z-LiNbO3 Films on Z-Sapphire","volume":"122","author":"Micard","year":"2023","journal-title":"Appl. Phys. Lett."},{"key":"ref_37","doi-asserted-by":"crossref","first-page":"1","DOI":"10.1016\/0022-0248(95)00570-6","article-title":"Epitaxial Growth of Lithium Niobate Thin Films by the Solid Source MOCVD Method","volume":"166","author":"Feigelson","year":"1996","journal-title":"J. Cryst. Growth"},{"key":"ref_38","doi-asserted-by":"crossref","first-page":"169","DOI":"10.1016\/j.sna.2019.03.037","article-title":"Sezawa SAW Devices: Review of Numerical-Experimental Studies and Recent Applications","volume":"292","author":"Serhane","year":"2019","journal-title":"Sens. Actuators A Phys."},{"key":"ref_39","unstructured":"Shibata, Y., Kuze, N., Kaya, K., Matsui, M., Kanai, M., and Kawai, T. (1996, January 3\u20136). Piezoelectric LiNbO3 and LiTaO3 Films for SAW Device Applications. Proceedings of the 1996 IEEE Ultrasonics Symposium, San Antonio, TX, USA."},{"key":"ref_40","first-page":"47","article-title":"Interdigital-Electrode Transducers for Surface Waves","volume":"Volume 2","author":"Royer","year":"2000","journal-title":"Elastic Waves in Solids: Generation, Acousto-Optic Interaction, Applications"},{"key":"ref_41","doi-asserted-by":"crossref","first-page":"51","DOI":"10.1080\/10584580212372","article-title":"An Alternative Route for the Synthesis of Oriented LiNbO3 Thin Films","volume":"43","author":"Bornand","year":"2002","journal-title":"Integr. Ferroelectr."},{"key":"ref_42","doi-asserted-by":"crossref","first-page":"3246","DOI":"10.1109\/TMTT.2021.3074918","article-title":"Gigahertz Low-Loss and High Power Handling Acoustic Delay Lines Using Thin-Film Lithium-Niobate-on-Sapphire","volume":"69","author":"Lu","year":"2021","journal-title":"IEEE Trans. Microw. Theory Tech."},{"key":"ref_43","doi-asserted-by":"crossref","first-page":"1498","DOI":"10.1063\/1.358900","article-title":"Epitaxial Growth and Surface Acoustic Wave Properties of Lithium Niobate Films Grown by Pulsed Laser Deposition","volume":"77","author":"Shibata","year":"1995","journal-title":"J. Appl. Phys."},{"key":"ref_44","doi-asserted-by":"crossref","first-page":"82","DOI":"10.1142\/S0129156400000684","article-title":"Coupling-of-Modes Analysis of SAW Devices","volume":"10","author":"Plessky","year":"2000","journal-title":"Int. J. High Speed Electron. Syst."},{"key":"ref_45","doi-asserted-by":"crossref","unstructured":"Smagin, N., Vanotti, M., Duquennoy, M., Rousseau, L., Alhousseini, H., Blondeau-Patissier, V., Ouaftouh, M., Valbin, L., and Herth, E. (2022). Electrical and Optical Characterization of SAW Sensors Coated with Parylene C and Their Analysis Using the Coupling-of-Modes (COM) Theory. Sensors, 22.","DOI":"10.3390\/s22228611"},{"key":"ref_46","doi-asserted-by":"crossref","first-page":"1812","DOI":"10.1109\/TUFFC.2012.2386","article-title":"Coupling-of-Modes Analysis and Modeling of Polymer-Coated Surface Acoustic Wave Resonators for Chemical Sensors","volume":"59","author":"Kshetrimayum","year":"2012","journal-title":"IEEE Trans. Ultrason. Ferroelectr. Freq. Control."},{"key":"ref_47","doi-asserted-by":"crossref","unstructured":"Hu, B., Zhang, S., Zhang, H., Lv, W., Zhang, C., Lv, X., and San, H. (2019). Fabrications of L-Band LiNbO3-Based SAW Resonators for Aerospace Applications. Micromachines, 10.","DOI":"10.3390\/mi10060349"},{"key":"ref_48","doi-asserted-by":"crossref","unstructured":"Shvetsov, A., Zhgoon, S., Antcev, I., Bogoslovsky, S., and Sapozhnikov, G. (2016, January 4\u20137). Quartz Orientations for Optimal Power Efficiency in Wireless SAW Temperature Sensors. Proceedings of the 2016 European Frequency and Time Forum (EFTF), York, UK.","DOI":"10.1109\/EFTF.2016.7477825"},{"key":"ref_49","doi-asserted-by":"crossref","first-page":"1","DOI":"10.1109\/LSENS.2024.3419213","article-title":"High-Q Wireless SAW Sensors Based on AlN\/Sapphire Bilayer Structure, Operating at 2.45 GHz Range for High-Temperature Applications","volume":"8","author":"Youbi","year":"2024","journal-title":"IEEE Sens. Lett."},{"key":"ref_50","doi-asserted-by":"crossref","first-page":"6","DOI":"10.1007\/s44275-024-00005-0","article-title":"Lithium Niobate\/Lithium Tantalate Single-Crystal Thin Films for Post-Moore Era Chip Applications","volume":"1","author":"Zhu","year":"2024","journal-title":"Moore More"},{"key":"ref_51","doi-asserted-by":"crossref","unstructured":"Yang, R., Wei, H., Tang, G., Cao, B., and Chen, K. (2025). Advanced Crystallization Methods for Thin-Film Lithium Niobate and Its Device Applications. Materials, 18.","DOI":"10.3390\/ma18050951"},{"key":"ref_52","doi-asserted-by":"crossref","first-page":"79","DOI":"10.1038\/s41378-025-00949-9","article-title":"SV-SAW RF Filters Based on Low-Cost 128\u00b0Y LiNbO3\/SiO2\/Poly-Si\/Si Substrate for 6G cmWave Wireless Communications","volume":"11","author":"Yang","year":"2025","journal-title":"Microsyst. Nanoeng."},{"key":"ref_53","doi-asserted-by":"crossref","first-page":"148","DOI":"10.1038\/s41378-025-01007-0","article-title":"Scaling LLSAW Filters on Engineered LiNbO3-on-SiC Wafer for 5G and Wi-Fi 6 Wideband Applications","volume":"11","author":"Liu","year":"2025","journal-title":"Microsyst. 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