{"status":"ok","message-type":"work","message-version":"1.0.0","message":{"indexed":{"date-parts":[[2026,7,30]],"date-time":"2026-07-30T12:15:25Z","timestamp":1785413725487,"version":"3.56.0"},"reference-count":37,"publisher":"MDPI AG","issue":"14","license":[{"start":{"date-parts":[[2026,7,8]],"date-time":"2026-07-08T00:00:00Z","timestamp":1783468800000},"content-version":"vor","delay-in-days":0,"URL":"https:\/\/creativecommons.org\/licenses\/by\/4.0\/"}],"funder":[{"name":"Sichuan Gas Turbine Research Institute of AECC","award":["GJLZ-0203-2024-0006"],"award-info":[{"award-number":["GJLZ-0203-2024-0006"]}]},{"DOI":"10.13039\/501100001809","name":"National Natural Science Foundation of China","doi-asserted-by":"crossref","award":["62475224"],"award-info":[{"award-number":["62475224"]}],"id":[{"id":"10.13039\/501100001809","id-type":"DOI","asserted-by":"crossref"}]},{"award":["62475224"],"award-info":[{"award-number":["62475224"]}],"id":[{"id":"https:\/\/ror.org\/01h0zpd94","id-type":"ROR","asserted-by":"publisher"}]}],"content-domain":{"domain":[],"crossmark-restriction":false},"short-container-title":["Sensors"],"abstract":"<jats:p>Semiconductor thin-film thermocouples offer significant advantages for in situ temperature monitoring in advanced engineering equipment. However, the absence of a reliable cold-junction temperature compensation methodology has constrained their practical deployment. This study proposes an in situ cold-junction compensation strategy based on a Pt thin-film resistance temperature detector (RTD), wherein the Pt thin-film RTD is conformally integrated with an ITO\u2013In2O3 thin-film thermocouple via sputtering and printing processes, enabling precise acquisition of cold-junction temperature without external temperature control apparatus. The fabricated Pt thin-film RTD exhibits a coefficient of determination of 0.99995 over the temperature range from ambient to 300 \u00b0C, with a temperature coefficient of resistance of 3810.09 ppm\/\u00b0C, a maximum fitting error of merely 1.02 \u00b0C, repeatability precision superior to 1.46 \u00b0C, temperature resolution better than 0.2 \u00b0C, and a long-term drift rate as low as 0.006%\/h. Under simulated practical operating scenarios, the RTD demonstrates superior thermal tracking performance relative to surface-mounted thermocouples. Conformal device fabrication is further realized on the curved surface of a turbine blade, where the RTD maintains characteristics consistent with those on planar substrates, and effective compensation up to 124 \u00b0C is achieved in butane flame thermal shock experiments. This strategy overcomes the limitation of conventional compensation methods to planar substrates, furnishing a reliable solution for high-precision in situ temperature monitoring on curved structures of hot-section components via semiconductor thin-film thermocouples.<\/jats:p>","DOI":"10.3390\/s26144337","type":"journal-article","created":{"date-parts":[[2026,7,8]],"date-time":"2026-07-08T16:16:18Z","timestamp":1783527378000},"page":"4337","update-policy":"https:\/\/doi.org\/10.3390\/mdpi_crossmark_policy","source":"Crossref","is-referenced-by-count":0,"title":["In Situ Cold-Junction Compensation Strategy for Semiconductor Thin-Film Thermocouples Based on a Pt Thin-Film Resistance Temperature Detector"],"prefix":"10.3390","volume":"26","author":[{"given":"Yuelong","family":"Li","sequence":"first","affiliation":[{"name":"Department of Mechanical and Electrical Engineering, Pen-Tung Sah Institute of Micro-Nano Science & Technology, Xiamen University, Xiamen 361005, China"}],"role":[{"vocabulary":"crossref","role":"author"}]},{"given":"Lantian","family":"Tang","sequence":"additional","affiliation":[{"name":"Department of Mechanical and Electrical Engineering, Pen-Tung Sah Institute of Micro-Nano Science & Technology, Xiamen University, Xiamen 361005, China"}],"role":[{"vocabulary":"crossref","role":"author"}]},{"given":"Zhixuan","family":"Su","sequence":"additional","affiliation":[{"name":"Department of Mechanical and Electrical Engineering, Pen-Tung Sah Institute of Micro-Nano Science & Technology, Xiamen University, Xiamen 361005, China"}],"role":[{"vocabulary":"crossref","role":"author"}]},{"given":"Yi","family":"Xu","sequence":"additional","affiliation":[{"name":"Research Institute Aero-Engine, Beihang University, Beijing 100191, China"},{"name":"AECC Sichuan Gas Turbine Research Establishment, Chengdu 610500, China"}],"role":[{"vocabulary":"crossref","role":"author"}]},{"given":"Xianwei","family":"Qian","sequence":"additional","affiliation":[{"name":"Department of Mechanical and Electrical Engineering, Pen-Tung Sah Institute of Micro-Nano Science & Technology, Xiamen University, Xiamen 361005, China"}],"role":[{"vocabulary":"crossref","role":"author"}]},{"given":"Yifan","family":"Wang","sequence":"additional","affiliation":[{"name":"Department of Mechanical and Electrical Engineering, Pen-Tung Sah Institute of Micro-Nano Science & Technology, Xiamen University, Xiamen 361005, China"}],"role":[{"vocabulary":"crossref","role":"author"}]},{"given":"Qinnan","family":"Chen","sequence":"additional","affiliation":[{"name":"Department of Mechanical and Electrical Engineering, Pen-Tung Sah Institute of Micro-Nano Science & Technology, Xiamen University, Xiamen 361005, China"}],"role":[{"vocabulary":"crossref","role":"author"}]},{"given":"Chao","family":"Wu","sequence":"additional","affiliation":[{"name":"Department of Mechanical Engineering, University of California at Berkeley, Berkeley, CA 94720, USA"}],"role":[{"vocabulary":"crossref","role":"author"}]}],"member":"1968","published-online":{"date-parts":[[2026,7,8]]},"reference":[{"key":"ref_1","doi-asserted-by":"crossref","first-page":"28318","DOI":"10.1016\/j.ceramint.2024.05.133","article-title":"Subtractive manufacturing of polymer-derived ceramic composite thick film sensor based on ultrafast laser etching","volume":"50","author":"Tang","year":"2024","journal-title":"Ceram. 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