{"status":"ok","message-type":"work","message-version":"1.0.0","message":{"indexed":{"date-parts":[[2026,4,5]],"date-time":"2026-04-05T05:17:34Z","timestamp":1775366254248,"version":"3.50.1"},"reference-count":38,"publisher":"MDPI AG","issue":"10","license":[{"start":{"date-parts":[[2020,9,24]],"date-time":"2020-09-24T00:00:00Z","timestamp":1600905600000},"content-version":"vor","delay-in-days":0,"URL":"https:\/\/creativecommons.org\/licenses\/by\/4.0\/"}],"funder":[{"DOI":"10.13039\/501100001871","name":"Funda\u00e7\u00e3o para a Ci\u00eancia e a Tecnologia","doi-asserted-by":"publisher","award":["UIDB\/00285\/2020"],"award-info":[{"award-number":["UIDB\/00285\/2020"]}],"id":[{"id":"10.13039\/501100001871","id-type":"DOI","asserted-by":"publisher"}]},{"DOI":"10.13039\/501100001871","name":"Funda\u00e7\u00e3o para a Ci\u00eancia e a Tecnologia","doi-asserted-by":"publisher","award":["02\/SAICT\/2017"],"award-info":[{"award-number":["02\/SAICT\/2017"]}],"id":[{"id":"10.13039\/501100001871","id-type":"DOI","asserted-by":"publisher"}]},{"DOI":"10.13039\/501100000780","name":"European Commission","doi-asserted-by":"publisher","award":["M-ERA-NET2\/0014\/2016"],"award-info":[{"award-number":["M-ERA-NET2\/0014\/2016"]}],"id":[{"id":"10.13039\/501100000780","id-type":"DOI","asserted-by":"publisher"}]},{"name":"European Union\u2019s Horizon 2020","award":["M-ERA-NET2\/0014\/2016"],"award-info":[{"award-number":["M-ERA-NET2\/0014\/2016"]}]}],"content-domain":{"domain":[],"crossmark-restriction":false},"short-container-title":["Coatings"],"abstract":"<jats:p>Recently, the use of Ne as a processing gas has been shown to increase the ionization degree of carbon in High Power Impulse Magnetron Sputtering (HiPIMS) plasmas. In this work, time-resolved measurements of the substrate\u2019s current density were carried out in order to study the time evolution of the ionic species arriving at the growing film. The addition of Ne to the plasma resulted in a steep increase of the sp3\/sp2 ratio in the films once the Ne contents in the processing atmosphere exceeded 26%. Increasing the Ne content is shown to increase both the total number of C ions generated in the plasmas and the ratio of C\/gaseous ions. The time-resolved substrate ion current density was used to evaluate the possibility of substrate biasing synchronizing with the discharge pulses in the HiPIMS process. It is shown that in pure Ar plasmas, substrate biasing should be confined to the time interval between 25 and 40 \u00b5s after the pulse starts, in order to maximize the C+\/Ar+ ratio bombarding the substrate and minimize the formation of film stresses. However, Ne addition to the processing gas shortens the traveling time of the carbon species towards the substrate, reducing the separation between the gaseous and carbon ion arrival times.<\/jats:p>","DOI":"10.3390\/coatings10100914","type":"journal-article","created":{"date-parts":[[2020,9,24]],"date-time":"2020-09-24T08:33:03Z","timestamp":1600936383000},"page":"914","update-policy":"https:\/\/doi.org\/10.3390\/mdpi_crossmark_policy","source":"Crossref","is-referenced-by-count":12,"title":["Correlation between Substrate Ion Fluxes and the Properties of Diamond-Like Carbon Films Deposited by Deep Oscillation Magnetron Sputtering in Ar and Ar + Ne Plasmas"],"prefix":"10.3390","volume":"10","author":[{"ORCID":"https:\/\/orcid.org\/0000-0002-6218-3098","authenticated-orcid":false,"given":"Jo\u00e3o","family":"Oliveira","sequence":"first","affiliation":[{"name":"Department of Mechanical Engineering, CEMMPRE, University of Coimbra, Rua Luis Reis Santos, 3030-788 Coimbra, Portugal"}]},{"ORCID":"https:\/\/orcid.org\/0000-0002-1020-4758","authenticated-orcid":false,"given":"F\u00e1bio","family":"Ferreira","sequence":"additional","affiliation":[{"name":"Department of Mechanical Engineering, CEMMPRE, University of Coimbra, Rua Luis Reis Santos, 3030-788 Coimbra, Portugal"}]},{"given":"Ricardo","family":"Serra","sequence":"additional","affiliation":[{"name":"Department of Mechanical Engineering, CEMMPRE, University of Coimbra, Rua Luis Reis Santos, 3030-788 Coimbra, Portugal"}]},{"ORCID":"https:\/\/orcid.org\/0000-0003-2679-2387","authenticated-orcid":false,"given":"Tomas","family":"Kubart","sequence":"additional","affiliation":[{"name":"\u201cSolid State Electronics\u201d, The \u00c5ngstr\u00f6m Laboratory, Uppsala University, SE-75121 Uppsala, Sweden"}]},{"ORCID":"https:\/\/orcid.org\/0000-0002-8686-8577","authenticated-orcid":false,"given":"Catalin","family":"Vitelaru","sequence":"additional","affiliation":[{"name":"National Institute of Research and Development for Optoelectronics\u2013INOE 2000, 409 Atomistilor Str., 051431 Magurele-Bucharest, Romania"}]},{"ORCID":"https:\/\/orcid.org\/0000-0001-8251-5099","authenticated-orcid":false,"given":"Albano","family":"Cavaleiro","sequence":"additional","affiliation":[{"name":"Department of Mechanical Engineering, CEMMPRE, University of Coimbra, Rua Luis Reis Santos, 3030-788 Coimbra, Portugal"},{"name":"LED&amp;Mat-IPN, Instituto Pedro Nunes, Laborat\u00f3rio de Ensaios Desgaste e Materiais, Rua Pedro Nunes, 3030-199 Coimbra, Portugal"}]}],"member":"1968","published-online":{"date-parts":[[2020,9,24]]},"reference":[{"key":"ref_1","doi-asserted-by":"crossref","first-page":"1111","DOI":"10.1016\/0022-3093(93)91193-7","article-title":"Influence of carbon ion energy on properties of highly tetrahedral diamond-like carbon","volume":"164","author":"Veerasamy","year":"1993","journal-title":"J. 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