{"status":"ok","message-type":"work","message-version":"1.0.0","message":{"indexed":{"date-parts":[[2025,10,11]],"date-time":"2025-10-11T00:37:04Z","timestamp":1760143024298,"version":"build-2065373602"},"reference-count":32,"publisher":"MDPI AG","issue":"1","license":[{"start":{"date-parts":[[2024,1,20]],"date-time":"2024-01-20T00:00:00Z","timestamp":1705708800000},"content-version":"vor","delay-in-days":0,"URL":"https:\/\/creativecommons.org\/licenses\/by\/4.0\/"}],"funder":[{"DOI":"10.13039\/501100001871","name":"FCT\u2014Funda\u00e7\u00e3o para a Ci\u00eancia e a Tecnologia","doi-asserted-by":"publisher","award":["UIDB\/EMS\/00285\/2020","LA\/P\/0112\/2020"],"award-info":[{"award-number":["UIDB\/EMS\/00285\/2020","LA\/P\/0112\/2020"]}],"id":[{"id":"10.13039\/501100001871","id-type":"DOI","asserted-by":"publisher"}]}],"content-domain":{"domain":[],"crossmark-restriction":false},"short-container-title":["Coatings"],"abstract":"<jats:p>NiTi shape memory alloy films were prepared by magnetron sputtering using a compound NiTi target and varying deposition parameters, such as power density, pressure, and deposition time. To promote crystallization, the films were heat treated at a temperature of 400 \u00b0C for 1 h. For the characterization, scanning electron microscopy, energy dispersive X-ray spectroscopy, atomic force microscopy, synchrotron X-ray diffraction, and nanoindentation techniques were used on both as-deposited and heat-treated films. Apart from the morphology and hardness of the as-deposited films that depend on the deposition pressure, the power applied to the target and the deposition pressure did not seem to significantly influence the characteristics of the NiTi films studied. After heat treatment, austenitic (B2) crystalline superelastic films with exceptionally high nickel content (~60 at.%) and vein-line cross-section morphology were produced. The crystallization of the films resulted in an increase in hardness, Young\u2019s modulus, and elastic recovery.<\/jats:p>","DOI":"10.3390\/coatings14010138","type":"journal-article","created":{"date-parts":[[2024,1,22]],"date-time":"2024-01-22T03:50:22Z","timestamp":1705895422000},"page":"138","update-policy":"https:\/\/doi.org\/10.3390\/mdpi_crossmark_policy","source":"Crossref","is-referenced-by-count":4,"title":["Exploring the Influence of the Deposition Parameters on the Properties of NiTi Shape Memory Alloy Films with High Nickel Content"],"prefix":"10.3390","volume":"14","author":[{"given":"Andr\u00e9 V.","family":"Fontes","sequence":"first","affiliation":[{"name":"CEMMPRE-Department of Mechanical Engineering, University of Coimbra, 3030-788 Coimbra, Portugal"}]},{"ORCID":"https:\/\/orcid.org\/0000-0001-7616-6793","authenticated-orcid":false,"given":"Patr\u00edcia","family":"Freitas Rodrigues","sequence":"additional","affiliation":[{"name":"CEMMPRE-Department of Mechanical Engineering, University of Coimbra, 3030-788 Coimbra, Portugal"}]},{"ORCID":"https:\/\/orcid.org\/0000-0003-4183-6464","authenticated-orcid":false,"given":"Daniela","family":"Santo","sequence":"additional","affiliation":[{"name":"CEMMPRE-Department of Mechanical Engineering, University of Coimbra, 3030-788 Coimbra, Portugal"}]},{"ORCID":"https:\/\/orcid.org\/0000-0002-8486-5436","authenticated-orcid":false,"given":"Ana Sofia","family":"Ramos","sequence":"additional","affiliation":[{"name":"CEMMPRE-Department of Mechanical Engineering, University of Coimbra, 3030-788 Coimbra, Portugal"}]}],"member":"1968","published-online":{"date-parts":[[2024,1,20]]},"reference":[{"key":"ref_1","doi-asserted-by":"crossref","first-page":"781","DOI":"10.1007\/s12666-017-1224-5","article-title":"60NiTi: A Review of Recent Research Findings, Potential for Structural and Mechanical Applications, and Areas of Continued Investigations","volume":"71","author":"Khanlari","year":"2018","journal-title":"Trans. Indian Inst. Met."},{"key":"ref_2","doi-asserted-by":"crossref","first-page":"698","DOI":"10.1016\/j.jallcom.2018.10.015","article-title":"Influence of solution heat treatment on the microstructural evolution and mechanical behavior of 60NiTi","volume":"775","author":"Xu","year":"2019","journal-title":"J. Alloys Compd."},{"key":"ref_3","doi-asserted-by":"crossref","first-page":"2453","DOI":"10.1016\/j.jallcom.2017.11.308","article-title":"Effects of Nb additions on the precipitate morphology and hardening behavior of Ni-rich Ni55Ti45 alloys","volume":"735","author":"Zhang","year":"2018","journal-title":"J. Alloys Compd."},{"key":"ref_4","doi-asserted-by":"crossref","unstructured":"Khanlari, K., Shi, Q., Li, K., Hu, K., Tan, C., Zhang, W., Cao, P., Achouri, I.E., and Liu, X. (2022). Fabrication of Ni-Rich 58NiTi and 60NiTi from Elementally Blended Ni and Ti Powders by a Laser Powder Bed Fusion Technique: Their Printing, Homogenization and Densification. Int. J. Mol. Sci., 23.","DOI":"10.3390\/ijms23169495"},{"key":"ref_5","doi-asserted-by":"crossref","unstructured":"Li, Y., Dai, J., and Song, Y. (2021). Research Progress of First Principles Studies on Oxidation Behaviors of Ti-Al Alloys and Alloying Influence. Metals, 11.","DOI":"10.3390\/met11060985"},{"key":"ref_6","doi-asserted-by":"crossref","first-page":"9","DOI":"10.1016\/j.sna.2014.10.034","article-title":"In-situ annealing of NiTi thin films at different temperatures","volume":"221","author":"Tillmann","year":"2015","journal-title":"Sens. Actuators A Phys."},{"key":"ref_7","doi-asserted-by":"crossref","first-page":"492","DOI":"10.1016\/j.apsusc.2013.05.159","article-title":"Influence of annealing on structural, morphological, compositional and surface properties of magnetron sputtered nickel\u2013titanium thin films","volume":"282","author":"Sharma","year":"2013","journal-title":"Appl. Surf. Sci."},{"key":"ref_8","doi-asserted-by":"crossref","first-page":"511","DOI":"10.1016\/j.pmatsci.2004.10.001","article-title":"Physical metallurgy of Ti\u2013Ni-based shape memory alloys","volume":"50","author":"Otsuka","year":"2005","journal-title":"Prog. Mater. Sci."},{"key":"ref_9","doi-asserted-by":"crossref","first-page":"2344","DOI":"10.1016\/j.actamat.2009.12.021","article-title":"Phase volume fractions and strain measurements in an ultrafine-grained NiTi shape-memory alloy during tensile loading","volume":"58","author":"Young","year":"2010","journal-title":"Acta Mater."},{"key":"ref_10","doi-asserted-by":"crossref","first-page":"3059","DOI":"10.1116\/1.573628","article-title":"The microstructure of sputter-deposited coatings","volume":"4","author":"Thornton","year":"1986","journal-title":"J. Vac. Sci. Technol. A Vac. Surf. Film."},{"key":"ref_11","doi-asserted-by":"crossref","first-page":"41","DOI":"10.1016\/j.vacuum.2013.12.010","article-title":"Deposition of superelastic composite NiTi based films","volume":"104","author":"Tillmann","year":"2014","journal-title":"Vacuum"},{"key":"ref_12","doi-asserted-by":"crossref","first-page":"129196","DOI":"10.1016\/j.surfcoat.2022.129196","article-title":"In-situ crystalline TiNi thin films deposited by HiPIMS at a low substrate temperature","volume":"455","author":"Bai","year":"2023","journal-title":"Surf. Coat. Technol."},{"key":"ref_13","doi-asserted-by":"crossref","first-page":"1596","DOI":"10.1016\/j.surfcoat.2008.12.005","article-title":"Grain size effect on structural, electrical and mechanical properties of NiTi thin films deposited by magnetron co-sputtering","volume":"203","author":"Kumar","year":"2009","journal-title":"Surf. Coat. Technol."},{"key":"ref_14","doi-asserted-by":"crossref","first-page":"107","DOI":"10.1016\/S0257-8972(01)01324-X","article-title":"26 Characterisation of TiNi Shape-Memory Alloy Thin Films for MEMS Applications","volume":"145","author":"Fu","year":"2001","journal-title":"Surf. Coat. Technol."},{"key":"ref_15","doi-asserted-by":"crossref","first-page":"2521","DOI":"10.1007\/s12666-021-02418-z","article-title":"A Critical Review on Nickel\u2013Titanium Thin-Film Shape Memory Alloy Fabricated by Magnetron Sputtering and Influence of Process Parameters","volume":"74","author":"Marupalli","year":"2021","journal-title":"Trans. Indian Inst. Met."},{"key":"ref_16","doi-asserted-by":"crossref","first-page":"3","DOI":"10.1557\/jmr.2004.19.1.3","article-title":"Measurement of hardness and elastic modulus by instrumented indentation: Advances in understanding and refinements to methodology","volume":"19","author":"Oliver","year":"2004","journal-title":"J. Mater. Res."},{"key":"ref_17","doi-asserted-by":"crossref","first-page":"208","DOI":"10.1016\/S0040-6090(99)00425-3","article-title":"Elastic properties of hydrogen-free amorphous carbon thin films and their relation with carbon\u2013carbon bonding","volume":"353","author":"Logothetidis","year":"1999","journal-title":"Thin Solid Films"},{"key":"ref_18","doi-asserted-by":"crossref","first-page":"429","DOI":"10.1016\/j.apsusc.2010.07.006","article-title":"Structural, electrical and mechanical properties of NiO thin films grown by pulsed laser deposition","volume":"257","author":"Fasaki","year":"2010","journal-title":"Appl. Surf. Sci."},{"key":"ref_19","doi-asserted-by":"crossref","first-page":"235","DOI":"10.1080\/08957959608201408","article-title":"Two-dimensional detector software: From real detector to idealised image or two-theta scan","volume":"14","author":"Hammersley","year":"1996","journal-title":"High Press. Res."},{"key":"ref_20","doi-asserted-by":"crossref","first-page":"69","DOI":"10.1109\/84.911094","article-title":"A robust co-sputtering fabrication procedure for TiNi shape memory alloys for MEMS","volume":"10","author":"Shih","year":"2001","journal-title":"J. Microelectromech. Syst."},{"key":"ref_21","doi-asserted-by":"crossref","first-page":"184","DOI":"10.1016\/j.jmatprotec.2015.01.014","article-title":"Comparison of NiTi thin films sputtered from separate elemental targets and Ti-rich alloy targets","volume":"220","author":"Tillmann","year":"2015","journal-title":"J. Mater. Process. Technol."},{"key":"ref_22","doi-asserted-by":"crossref","first-page":"106","DOI":"10.1016\/S0921-5093(99)00292-0","article-title":"Martensitic transformation and shape memory behavior in sputter-deposited TiNi-base thin films","volume":"273\u2013275","author":"Miyazaki","year":"1999","journal-title":"Mater. Sci. Eng. A"},{"key":"ref_23","doi-asserted-by":"crossref","first-page":"1225","DOI":"10.1016\/j.actamat.2004.11.016","article-title":"On the mechanism of heterogeneous reaction and phase formation in Ti\/Al multilayer nanofilms","volume":"53","author":"Gachon","year":"2005","journal-title":"Acta Mater."},{"key":"ref_24","doi-asserted-by":"crossref","first-page":"284","DOI":"10.1016\/j.jallcom.2014.08.253","article-title":"Zr\u2013Cu thin film metallic glasses: An assessment of the thermal stability and phases\u2019 transformation mechanisms","volume":"619","author":"Apreutesei","year":"2015","journal-title":"J. Alloys Compd."},{"key":"ref_25","doi-asserted-by":"crossref","first-page":"253","DOI":"10.1016\/j.tsf.2015.01.063","article-title":"Effects of tungsten contents on the microstructure, mechanical and anticorrosion properties of Zr\u2013W\u2013Ti thin film metallic glasses","volume":"584","author":"Chang","year":"2015","journal-title":"Thin Solid Films"},{"key":"ref_26","doi-asserted-by":"crossref","unstructured":"Rodrigues, P.F., Fernandes, F.B., Magalh\u00e3es, R., Camacho, E., Lopes, A., Paula, A., Basu, R., and Schell, N. (2020). Thermo-mechanical characterization of NiTi orthodontic archwires with graded actuating forces. J. Mech. Behav. Biomed. Mater., 107.","DOI":"10.1016\/j.jmbbm.2020.103747"},{"key":"ref_27","first-page":"06KK01","article-title":"Crystallization of nanoscale NiTi alloy thin films using rapid thermal annealing","volume":"34","author":"Hou","year":"2016","journal-title":"J. Vac. Sci. Technol. B Nanotechnol. Microelectron. Mater. Process. Meas. Phenom."},{"key":"ref_28","doi-asserted-by":"crossref","first-page":"310","DOI":"10.1016\/S0921-5093(99)00362-7","article-title":"Influence of thermal annealing on the martensitic transitions in Ni\u2013Ti shape memory alloys","volume":"273\u2013275","author":"Somsen","year":"1999","journal-title":"Mater. Sci. Eng. A"},{"key":"ref_29","unstructured":"Otsuka, K., and Wayman, C.M. (1998). Shape Memory Materials, Cambridge University Press. [1st ed.]."},{"key":"ref_30","doi-asserted-by":"crossref","first-page":"140753","DOI":"10.1016\/j.msea.2021.140753","article-title":"Influence of Ni4Ti3 precipitate on pseudoelasticity of austenitic NiTi shape memory alloys deformed at high strain rate","volume":"804","author":"Yu","year":"2021","journal-title":"Mater. Sci. Eng. A"},{"key":"ref_31","first-page":"8","article-title":"Evaluation by nanoindentation of the influence of heat treatments and the consequent induced microstructure on the mechanical response of the heat-treated L-PBF AlSi10Mg alloy","volume":"6","year":"2022","journal-title":"Metall. Ital."},{"key":"ref_32","doi-asserted-by":"crossref","first-page":"842","DOI":"10.1016\/j.wear.2005.01.015","article-title":"Novel layered tribological coatings using a superelastic NiTi interlayer","volume":"259","author":"Ni","year":"2005","journal-title":"Wear"}],"container-title":["Coatings"],"original-title":[],"language":"en","link":[{"URL":"https:\/\/www.mdpi.com\/2079-6412\/14\/1\/138\/pdf","content-type":"unspecified","content-version":"vor","intended-application":"similarity-checking"}],"deposited":{"date-parts":[[2025,10,10]],"date-time":"2025-10-10T13:46:18Z","timestamp":1760103978000},"score":1,"resource":{"primary":{"URL":"https:\/\/www.mdpi.com\/2079-6412\/14\/1\/138"}},"subtitle":[],"short-title":[],"issued":{"date-parts":[[2024,1,20]]},"references-count":32,"journal-issue":{"issue":"1","published-online":{"date-parts":[[2024,1]]}},"alternative-id":["coatings14010138"],"URL":"https:\/\/doi.org\/10.3390\/coatings14010138","relation":{},"ISSN":["2079-6412"],"issn-type":[{"type":"electronic","value":"2079-6412"}],"subject":[],"published":{"date-parts":[[2024,1,20]]}}}