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The results demonstrated that the torsional MEMS micromirror with the proposed sliding mode controller has a good transient response and tracking performance.<\/p>","DOI":"10.4018\/ijimr.2013010102","type":"journal-article","created":{"date-parts":[[2013,9,27]],"date-time":"2013-09-27T12:42:40Z","timestamp":1380285760000},"page":"16-26","source":"Crossref","is-referenced-by-count":0,"title":["Sliding Mode Control of a 2D Torsional MEMS Micromirror with Sidewall Electrodes"],"prefix":"10.4018","volume":"3","author":[{"given":"Hui","family":"Chen","sequence":"first","affiliation":[{"name":"College of Automation Science and Engineering, South China University of Technology, Guangzhou, China"}],"role":[{"vocabulary":"crossref","role":"author"}]},{"given":"Manu","family":"Pallapa","sequence":"additional","affiliation":[{"name":"Systems Design Engineering, University of Waterloo, Waterloo, ON, Canada"}],"role":[{"vocabulary":"crossref","role":"author"}]},{"given":"Weijie","family":"Sun","sequence":"additional","affiliation":[{"name":"College of Automation Science and Engineering, South China University of Technology, Guangzhou, China"}],"role":[{"vocabulary":"crossref","role":"author"}]},{"given":"Zhendong","family":"Sun","sequence":"additional","affiliation":[{"name":"College of Automation Science and Engineering, South China University of Technology, Guangzhou, China"}],"role":[{"vocabulary":"crossref","role":"author"}]},{"given":"John T. 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