{"status":"ok","message-type":"work","message-version":"1.0.0","message":{"indexed":{"date-parts":[[2026,6,10]],"date-time":"2026-06-10T14:36:01Z","timestamp":1781102161991,"version":"3.54.1"},"reference-count":15,"publisher":"IGI Global Scientific Publishing","issue":"1","content-domain":{"domain":[],"crossmark-restriction":false},"short-container-title":[],"published-print":{"date-parts":[[2013,1,1]]},"abstract":"<p>A new concept of Atomic Force Microscope (AFM) oscillating probes using electrostatic excitation and piezoresistive detection is presented. The probe is characterized by electrical methods in a vacuum chamber and by mechanical methods in air. The frequency-mixing measurement technique is developed to reduce the parasitic signal level. These probes resonant in the 1MHz range and the quality factor is measured about 53000 in vacuum and 3000 in air. The ring probe is mounted onto a commercial AFM set-up and the surface topography of PMMA sample (2 \u00b5m square) is obtained. The force resolution deduced from the measurements is about 10 pN\/Hz0.5.<\/p>","DOI":"10.4018\/ijimr.2013010104","type":"journal-article","created":{"date-parts":[[2013,9,27]],"date-time":"2013-09-27T12:42:40Z","timestamp":1380285760000},"page":"38-52","source":"Crossref","is-referenced-by-count":0,"title":["Piezoresistive Ring-Shaped AFM Sensors with Pico-Newton Force Resolution"],"prefix":"10.4018","volume":"3","author":[{"given":"Zhuang","family":"Xiong","sequence":"first","affiliation":[{"name":"CNRS IEMN UMR 8520, NAM6 group, University Lille 1, Villeneuve d\u2019Ascq, Lille, France"}],"role":[{"vocabulary":"crossref","role":"author"}]},{"given":"Benjamin","family":"Walter","sequence":"additional","affiliation":[{"name":"CNRS IEMN UMR 8520, NAM6 group, University Lille 1, Villeneuve d\u2019Ascq, Lille, France"}],"role":[{"vocabulary":"crossref","role":"author"}]},{"given":"Estelle","family":"Mairiaux","sequence":"additional","affiliation":[{"name":"CNRS IEMN UMR 8520, NAM6 group, University Lille 1, Villeneuve d\u2019Ascq, Lille, France"}],"role":[{"vocabulary":"crossref","role":"author"}]},{"given":"Marc","family":"Faucher","sequence":"additional","affiliation":[{"name":"CNRS IEMN UMR 8520, NAM6 group, University Lille 1, Villeneuve d\u2019Ascq, Lille, France"}],"role":[{"vocabulary":"crossref","role":"author"}]},{"given":"Lionel","family":"Buchaillot","sequence":"additional","affiliation":[{"name":"CNRS IEMN UMR 8520, NAM6 group, University Lille 1, Villeneuve d\u2019Ascq, Lille, France"}],"role":[{"vocabulary":"crossref","role":"author"}]},{"given":"Bernard","family":"Legrand","sequence":"additional","affiliation":[{"name":"CNRS IEMN UMR 8520, NAM6 group, University Lille 1, Villeneuve d\u2019Ascq, Lille, France"}],"role":[{"vocabulary":"crossref","role":"author"}]}],"member":"2432","reference":[{"key":"ijimr.2013010104-0","doi-asserted-by":"publisher","DOI":"10.1109\/JMEMS.2011.2179012"},{"key":"ijimr.2013010104-1","doi-asserted-by":"publisher","DOI":"10.1063\/1.2061850"},{"key":"ijimr.2013010104-2","doi-asserted-by":"publisher","DOI":"10.1016\/j.progsurf.2008.09.001"},{"key":"ijimr.2013010104-3","doi-asserted-by":"publisher","DOI":"10.1109\/JMEMS.2005.856675"},{"key":"ijimr.2013010104-4","doi-asserted-by":"crossref","unstructured":"Faucher, M., Walter, B., Rollier, A., Seguini, K., Legrand, B., Couturier, G., et al. (2007). Proposition of atomic force probes based on silicon ring-resonators. In Proceedings of the 14th International Conference on Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS\u201907) (pp. 1529\u20131532).","DOI":"10.1109\/SENSOR.2007.4300436"},{"key":"ijimr.2013010104-5","doi-asserted-by":"publisher","DOI":"10.1016\/j.mee.2010.06.032"},{"key":"ijimr.2013010104-6","doi-asserted-by":"crossref","unstructured":"Kaajakari, V., Mattila, T., & Oja, A. (2003). Square-extensional mode single-crystal silicon micromechanical RF-resonator. In Proceedings of the 12th International Conference on Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS\u201903) (pp. 951\u2013954).","DOI":"10.1109\/SENSOR.2003.1216924"},{"key":"ijimr.2013010104-7","doi-asserted-by":"crossref","unstructured":"Kanda, Y. (1982). A graphical representation of the piezoresistance coefficients in silicon. Transactions on Electron Devices, 29(1), 64\u201370. Retrieved from http:\/\/ieeexplore.ieee.org\/xpls\/abs_all.jsp?arnumber=1482156","DOI":"10.1109\/T-ED.1982.20659"},{"key":"ijimr.2013010104-8","doi-asserted-by":"publisher","DOI":"10.1121\/1.380829"},{"key":"ijimr.2013010104-9","author":"S.Rao","year":"2007","journal-title":"Vibraion of continuous systems"},{"key":"ijimr.2013010104-10","doi-asserted-by":"publisher","DOI":"10.1063\/1.124780"},{"key":"ijimr.2013010104-11","doi-asserted-by":"crossref","unstructured":"Walter, B., Faucher, M., Mairiaux, E., Xiong, Z., Buchaillot, L., & Legrand, B. (2011). 4.8 MHz AFM nanoprobes with capacitive transducers and batch-fabricated nanotips. In Proceedings of the Micro Electro Mechanical Systems (MEMS2011) (pp. 517\u2013520).","DOI":"10.1109\/MEMSYS.2011.5734475"},{"key":"ijimr.2013010104-12","doi-asserted-by":"crossref","unstructured":"Walter, B., Mairiaux, E., Xiong, Z., Faucher, M., Buchaillot, L., & Legrand, B. (2012). DNA origami imaging with 10.9 MHz AFM MEMS probes. In Proceedings of the Micro Electro Mechanical Systems (MEMS2012) (pp. 555\u2013558).","DOI":"10.1109\/MEMSYS.2012.6170236"},{"key":"ijimr.2013010104-13","doi-asserted-by":"publisher","DOI":"10.1063\/1.1713863"},{"key":"ijimr.2013010104-14","doi-asserted-by":"publisher","DOI":"10.1109\/TUFFC.2008.725"}],"container-title":["International Journal of Intelligent Mechatronics and Robotics"],"original-title":[],"language":"ng","link":[{"URL":"https:\/\/www.igi-global.com\/viewtitle.aspx?TitleId=87480","content-type":"unspecified","content-version":"vor","intended-application":"similarity-checking"}],"deposited":{"date-parts":[[2022,6,1]],"date-time":"2022-06-01T11:00:03Z","timestamp":1654081203000},"score":1,"resource":{"primary":{"URL":"https:\/\/services.igi-global.com\/resolvedoi\/resolve.aspx?doi=10.4018\/ijimr.2013010104"}},"subtitle":[""],"short-title":[],"issued":{"date-parts":[[2013,1,1]]},"references-count":15,"journal-issue":{"issue":"1","published-print":{"date-parts":[[2013,1]]}},"URL":"https:\/\/doi.org\/10.4018\/ijimr.2013010104","relation":{},"ISSN":["2156-1664","2156-1656"],"issn-type":[{"value":"2156-1664","type":"print"},{"value":"2156-1656","type":"electronic"}],"subject":[],"published":{"date-parts":[[2013,1,1]]}}}